Inventor

SALZMAN PHIL

US4 patents

Patents

4 patents

US5848670ADec 15, 1998

Lift pin guidance apparatus

APPLIED MATERIALS INC115 citations94

US5565985AOct 15, 1996

Particle monitoring sensor

APPLIED MATERIALS INC18 citations81

US5463460AOct 31, 1995

Particle monitoring sensor

APPLIED MATERIALS INC14 citations81

US6011622AJan 4, 2000

Particle monitoring system

APPLIED MATERIALS INC12 citations72