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Inventor
AIKOU KENJI
JP
2 patents
⚠️ This page may combine multiple inventors who share the name “AIKOU KENJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI ELECTR ENG
1 patent
US6295131B1
Sep 25, 2001
Interference detecting system for use in interferometer
HITACHI ELECTR ENG
15 citations
78
HITACHI HIGH TECH ELECT ENG CO
1 patent
US6888918B2
May 3, 2005
Surface inspection method and surface inspection apparatus
HITACHI HIGH TECH ELECT ENG CO
11 citations
70