Inventor
TANG KUO-LUNG
TW3 patents
Patents
3 patentsUS6893969B2May 17, 2005
Use of ammonia for etching organic low-k dielectrics
LAM RES CORP14 citations81
US7049052B2May 23, 2006
Method providing an improved bi-layer photoresist pattern
LAM RES CORP6 citations58
US7105454B2Sep 12, 2006
Use of ammonia for etching organic low-k dielectrics
LAM RES CORP1 citations49