Inventor
SACHSE HERMANN
DE4 patents
Patents
4 patentsUS6753236B2Jun 22, 2004
Method for planarizing an isolating layer
INFINEON TECHNOLOGIES AG7 citations71
US7465522B2Dec 16, 2008
Photolithographic mask having half tone main features and perpendicular half tone assist features
INFINEON TECHNOLOGIES AG4 citations60
US6849364B2Feb 1, 2005
Mask for fabricating semiconductor components
INFINEON TECHNOLOGIES AG3 citations59
US7618867B2Nov 17, 2009
Method of forming a doped portion of a semiconductor and method of forming a transistor
INFINEON TECHNOLOGIES AG5 citations58