Inventor
OMURA YASUHIRO
85 patents
⚠️ This page may combine multiple inventors who share the name “OMURA YASUHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIKON CORP
45 patentsUS6195213B1Feb 27, 2001
Projection exposure apparatus and method
NIKON CORP143 citations99
US5835275ANov 10, 1998
Catadioptric system for photolithography
NIKON CORP292 citations99
US6750948B2Jun 15, 2004
Projection optical system, projection exposure apparatus having the projection optical system, projection method thereof, exposure method thereof and fabricating method for fabricating a device using the projection exposure apparatus
NIKON CORP107 citations98
US6473243B1Oct 29, 2002
Catadioptric imaging system and a projection exposure apparatus provided with said imaging system
NIKON CORP85 citations98
US6757051B2Jun 29, 2004
Projection optical system, manufacturing method thereof, and projection exposure apparatus
NIKON CORP101 citations97
US7580197B2Aug 25, 2009
Projection optical system and method for photolithography and exposure apparatus and method using same
NIKON CORP34 citations96
US7362508B2Apr 22, 2008
Projection optical system and method for photolithography and exposure apparatus and method using same
NIKON CORP46 citations96
US7348575B2Mar 25, 2008
Projection optical system, exposure apparatus, and exposure method
NIKON CORP46 citations96
US7312463B2Dec 25, 2007
Projection optical system, exposure apparatus, and exposure method
NIKON CORP33 citations96
US7309870B2Dec 18, 2007
Projection optical system, exposure apparatus, and exposure method
NIKON CORP35 citations96
US6909492B2Jun 21, 2005
Projection optical system, exposure apparatus and exposure method
NIKON CORP57 citations96
US6674513B2Jan 6, 2004
Projection exposure methods and apparatus, and projection optical systems
NIKON CORP48 citations96
US6661499B2Dec 9, 2003
Projection exposure apparatus with a catadioptric projection optical system
NIKON CORP64 citations96
US6639734B2Oct 28, 2003
Catadioptric imaging system and a projection exposure apparatus provided with said imaging system
NIKON CORP46 citations96
US6512641B2Jan 28, 2003
Projection exposure apparatus and method
NIKON CORP53 citations96
US6466303B1Oct 15, 2002
Projection exposure apparatus with a catadioptric projection optical system
NIKON CORP76 citations96
US6451507B1Sep 17, 2002
Exposure apparatus and method
NIKON CORP55 citations96
US5805357ASep 8, 1998
Catadioptric system for photolithography
NIKON CORP56 citations96
US6903803B2Jun 7, 2005
Projection optical system, exposure apparatus incorporating this projection optical system, and manufacturing method for micro devices using the exposure apparatus
NIKON CORP20 citations93
US6864961B2Mar 8, 2005
Projection exposure methods and apparatus, and projection optical systems
NIKON CORP32 citations93
US6844982B2Jan 18, 2005
Projection optical system, exposure system provided with the projection optical system, and exposure method using the projection optical system
NIKON CORP36 citations93
US6606144B1Aug 12, 2003
Projection exposure methods and apparatus, and projection optical systems
NIKON CORP54 citations93
US6556353B2Apr 29, 2003
Projection optical system, projection exposure apparatus, and projection exposure method
NIKON CORP43 citations93
US6362926B1Mar 26, 2002
Projection exposure apparatus and method
NIKON CORP21 citations93
US6081382AJun 27, 2000
Catadioptric reduction projection optical system
NIKON CORP51 citations93
US6069749AMay 30, 2000
Catadioptric reduction optical system
NIKON CORP22 citations93
US5835284ANov 10, 1998
Catadioptric optical system and adjusting method
NIKON CORP31 citations93
US7688517B2Mar 30, 2010
Projection optical system and method for photolithography and exposure apparatus and method using same
NIKON CORP12 citations92
US7619827B2Nov 17, 2009
Projection optical system and method for photolithography and exposure apparatus and method using same
NIKON CORP10 citations92
US7609455B2Oct 27, 2009
Projection optical system and method for photolithography and exposure apparatus and method using same
NIKON CORP10 citations92
US6831731B2Dec 14, 2004
Projection optical system and an exposure apparatus with the projection optical system
NIKON CORP45 citations92
US6788389B2Sep 7, 2004
Production method of projection optical system
NIKON CORP47 citations91
US7701640B2Apr 20, 2010
Projection optical system and method for photolithography and exposure apparatus and method using same
NIKON CORP8 citations84
US7551362B2Jun 23, 2009
Projection optical system and method for photolithography and exposure apparatus and method using same
NIKON CORP8 citations84
US6208473B1Mar 27, 2001
Catadioptric projection lens
NIKON CORP19 citations84
US9360763B2Jun 7, 2016
Projection optical system, exposure apparatus, and exposure method
NIKON CORP4 citations83
US6452723B1Sep 17, 2002
Exposure apparatus and method
NIKON CORP10 citations82
US6844915B2Jan 18, 2005
Optical system and exposure apparatus provided with the optical system
NIKON CORP10 citations74
US6714280B2Mar 30, 2004
Projection optical system, projection exposure apparatus, and projection exposure method
NIKON CORP8 citations74
US6707601B2Mar 16, 2004
Exposure apparatus and method
NIKON CORP4 citations74
US6646797B2Nov 11, 2003
Exposure apparatus and method
NIKON CORP6 citations74
US6104542AAug 15, 2000
Wide-angle eyepiece lens with large eye relief
NIKON CORP12 citations74
US5877900AMar 2, 1999
Eyepiece with wide field of view
NIKON CORP8 citations74
US5815317ASep 29, 1998
Eyepiece with broad visibility
NIKON CORP11 citations74
US6639732B2Oct 28, 2003
Projection exposure apparatus and method
NIKON CORP9 citations73
OMURA YASUHIRO
3 patentsUS8339578B2Dec 25, 2012
Optical system, exposure system, and exposure method
OMURA YASUHIRO11 citations84
US8854601B2Oct 7, 2014
Projection optical system, exposure apparatus, and exposure method
OMURA YASUHIRO8 citations82
US9086635B2Jul 21, 2015
Projection optical system, exposure apparatus, and exposure method
OMURA YASUHIRO3 citations73
ISHIKAWAJIMA HARIMA HEAVY IND
2 patentsShowing the top 50 of 85 patents by PatentIndex Score.