Inventor

SHEKHAR SAIRAM

US2 patents

Patents

2 patents

US9281210B2Mar 8, 2016

Wet-process ceria compositions for polishing substrates, and methods related thereto

CABOT MICROELECTRONICS CORP1 citations47

US9850402B2Dec 26, 2017

CMP compositions and methods for selective removal of silicon nitride

CABOT MICROELECTRONICS CORP1 citations42