Inventor
OWENS ROBERT A
US10 patents
⚠️ This page may combine multiple inventors who share the name “OWENS ROBERT A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
PETRARCH SYSTEMS INC
3 patentsUS4824769AApr 25, 1989
High contrast photoresist developer
PETRARCH SYSTEMS INC9 citations73
US4670372AJun 2, 1987
Process of developing radiation imaged photoresist with alkaline developer solution including a carboxylated surfactant
PETRARCH SYSTEMS INC9 citations73
US4822722AApr 18, 1989
Process of using high contrast photoresist developer with enhanced sensitivity to form positive resist image
PETRARCH SYSTEMS INC9 citations70