Inventor
SIM JAE HEE
KR3 patents
Patents
3 patentsUS11651968B2May 16, 2023
Method for forming planarization layer and pattern forming method using the same
SK HYNIX INC0 citations52
US9947546B2Apr 17, 2018
Semiconductor integrated circuit device with a surface and method of manufacturing the same
SK HYNIX INC0 citations47
US9796001B2Oct 24, 2017
Apparatus and method for removing particles present on a wafer using photoelectrons and an electric field
SK HYNIX INC1 citations43