Inventor
SANO ATSUSHI
JP152 patents
⚠️ This page may combine multiple inventors who share the name “SANO ATSUSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI INT ELECTRIC INC
25 patentsUS9472391B2Oct 18, 2016
Semiconductor device manufacturing method
HITACHI INT ELECTRIC INC11 citations84
US9443718B2Sep 13, 2016
Method of manufacturing semiconductor device, substrate processing apparatus, and non-transitory computer-readable recording medium
HITACHI INT ELECTRIC INC11 citations84
US9353438B2May 31, 2016
Substrate processing apparatus, non-transitory computer-readable recording medium thereof and semiconductor manufacturing method by employing thereof
HITACHI INT ELECTRIC INC6 citations84
US9257275B2Feb 9, 2016
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
HITACHI INT ELECTRIC INC7 citations84
US9190298B2Nov 17, 2015
Film forming method and recording medium for performing the method
HITACHI INT ELECTRIC INC5 citations84
US9054046B2Jun 9, 2015
Method of manufacturing semiconductor device and method of processing substrate
HITACHI INT ELECTRIC INC10 citations84
US9053927B2Jun 9, 2015
Method of manufacturing semiconductor device and method of processing substrate
HITACHI INT ELECTRIC INC11 citations84
US8986450B1Mar 24, 2015
Substrate processing apparatus and method of manufacturing semiconductor device
HITACHI INT ELECTRIC INC8 citations84
US8925562B1Jan 6, 2015
Substrate processing apparatus and method of manufacturing semiconductor device
HITACHI INT ELECTRIC INC6 citations84
US8367566B2Feb 5, 2013
Method for manufacturing semiconductor device and method for processing substrate
HITACHI INT ELECTRIC INC5 citations83
US10340134B2Jul 2, 2019
Semiconductor device manufacturing method, substrate processing apparatus, and recording medium
HITACHI INT ELECTRIC INC5 citations73
US10128104B2Nov 13, 2018
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
HITACHI INT ELECTRIC INC2 citations73
US9816181B2Nov 14, 2017
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
HITACHI INT ELECTRIC INC3 citations73
US9732426B2Aug 15, 2017
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
HITACHI INT ELECTRIC INC2 citations73
US9704703B2Jul 11, 2017
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
HITACHI INT ELECTRIC INC3 citations73
US9508546B2Nov 29, 2016
Method of manufacturing semiconductor device
HITACHI INT ELECTRIC INC3 citations73
US9478413B2Oct 25, 2016
Method of manufacturing semiconductor device, substrate processing method, substrate processing apparatus, and recording medium
HITACHI INT ELECTRIC INC3 citations73
US9460911B2Oct 4, 2016
Method of manufacturing semiconductor device and substrate processing method
HITACHI INT ELECTRIC INC4 citations73
US9437422B2Sep 6, 2016
Method of manufacturing semiconductor device and substrate processing method
HITACHI INT ELECTRIC INC3 citations73
US9425075B2Aug 23, 2016
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
HITACHI INT ELECTRIC INC3 citations73
US9330903B2May 3, 2016
Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium
HITACHI INT ELECTRIC INC5 citations73
US9281181B2Mar 8, 2016
Film forming method and recording medium for performing the method
HITACHI INT ELECTRIC INC3 citations73
US9234277B2Jan 12, 2016
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
HITACHI INT ELECTRIC INC3 citations73
US9177786B2Nov 3, 2015
Method of manufacturing semiconductor device, method of processing substrate, substrate processing apparatus, and recording medium
HITACHI INT ELECTRIC INC5 citations73
US8785333B2Jul 22, 2014
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
HITACHI INT ELECTRIC INC6 citations73
SANO ATSUSHI
10 patentsUS8652704B2Feb 18, 2014
Direct alcohol fuel cell with cathode catalyst layer containing silver and method for producing the same
SANO ATSUSHI23 citations93
US8235001B2Aug 7, 2012
Substrate processing apparatus and method for manufacturing semiconductor device
SANO ATSUSHI30 citations91
US9039939B2May 26, 2015
Production method of active material, and active material
SANO ATSUSHI15 citations84
US8936871B2Jan 20, 2015
Active material and positive electrode and lithium-ion second battery using same
SANO ATSUSHI11 citations83
US8821763B2Sep 2, 2014
Active material and method of manufacturing active material
SANO ATSUSHI11 citations83
US8445135B2May 21, 2013
Method of manufacturing active material, active material, electrode, and lithium-ion secondary battery
SANO ATSUSHI6 citations83
US8993171B2Mar 31, 2015
Active material, electrode containing the active material, lithium secondary battery including the electrode, and method for making active material
SANO ATSUSHI6 citations82
US9481279B2Nov 1, 2016
Seat back frame for vehicle and method for manufacturing same
SANO ATSUSHI3 citations73
US10230108B2Mar 12, 2019
Active material, method for manufacturing active material, electrode, and lithium ion secondary battery
SANO ATSUSHI3 citations72
US10611639B2Apr 7, 2020
Active material, method for manufacturing active material, electrode, lithium ion secondary battery, and method for manufacturing lithium ion secondary battery
SANO ATSUSHI3 citations71
TDK CORP
6 patentsUS7691533B2Apr 6, 2010
Electrode with conductive polymer-covered carbon nanotubes and electrochemical element employing the same
TDK CORP22 citations93
US7754382B2Jul 13, 2010
Electrochemical capacitor having at least one electrode including composite particles
TDK CORP19 citations92
US7368202B2May 6, 2008
Electrochemical device having opposing electrodes
TDK CORP19 citations92
US8932762B2Jan 13, 2015
Active material and positive electrode and lithium-ion second battery using same
TDK CORP11 citations83
US7189478B2Mar 13, 2007
Lithium secondary battery
TDK CORP9 citations74
US9419308B2Aug 16, 2016
All-solid-state lithium-ion secondary battery and production method thereof
TDK CORP4 citations73
CANON KK
3 patentsMURATA MANUFACTURING CO
1 patentDENSO CORP
1 patentOTA YOSUKE
1 patentKATO TOMOHIKO
1 patentNIPPON KOGAKU KK
1 patentKAWASAKI HEAVY IND LTD
1 patentShowing the top 50 of 152 patents by PatentIndex Score.