P

Inventor

SANO ATSUSHI

JP152 patents
⚠️ This page may combine multiple inventors who share the name “SANO ATSUSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI INT ELECTRIC INC

25 patents
US9472391B2Oct 18, 2016

Semiconductor device manufacturing method

HITACHI INT ELECTRIC INC11 citations84
US9443718B2Sep 13, 2016

Method of manufacturing semiconductor device, substrate processing apparatus, and non-transitory computer-readable recording medium

HITACHI INT ELECTRIC INC11 citations84
US9353438B2May 31, 2016

Substrate processing apparatus, non-transitory computer-readable recording medium thereof and semiconductor manufacturing method by employing thereof

HITACHI INT ELECTRIC INC6 citations84
US9257275B2Feb 9, 2016

Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium

HITACHI INT ELECTRIC INC7 citations84
US9190298B2Nov 17, 2015

Film forming method and recording medium for performing the method

HITACHI INT ELECTRIC INC5 citations84
US9054046B2Jun 9, 2015

Method of manufacturing semiconductor device and method of processing substrate

HITACHI INT ELECTRIC INC10 citations84
US9053927B2Jun 9, 2015

Method of manufacturing semiconductor device and method of processing substrate

HITACHI INT ELECTRIC INC11 citations84
US8986450B1Mar 24, 2015

Substrate processing apparatus and method of manufacturing semiconductor device

HITACHI INT ELECTRIC INC8 citations84
US8925562B1Jan 6, 2015

Substrate processing apparatus and method of manufacturing semiconductor device

HITACHI INT ELECTRIC INC6 citations84
US8367566B2Feb 5, 2013

Method for manufacturing semiconductor device and method for processing substrate

HITACHI INT ELECTRIC INC5 citations83
US10340134B2Jul 2, 2019

Semiconductor device manufacturing method, substrate processing apparatus, and recording medium

HITACHI INT ELECTRIC INC5 citations73
US10128104B2Nov 13, 2018

Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium

HITACHI INT ELECTRIC INC2 citations73
US9816181B2Nov 14, 2017

Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium

HITACHI INT ELECTRIC INC3 citations73
US9732426B2Aug 15, 2017

Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium

HITACHI INT ELECTRIC INC2 citations73
US9704703B2Jul 11, 2017

Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium

HITACHI INT ELECTRIC INC3 citations73
US9508546B2Nov 29, 2016

Method of manufacturing semiconductor device

HITACHI INT ELECTRIC INC3 citations73
US9478413B2Oct 25, 2016

Method of manufacturing semiconductor device, substrate processing method, substrate processing apparatus, and recording medium

HITACHI INT ELECTRIC INC3 citations73
US9460911B2Oct 4, 2016

Method of manufacturing semiconductor device and substrate processing method

HITACHI INT ELECTRIC INC4 citations73
US9437422B2Sep 6, 2016

Method of manufacturing semiconductor device and substrate processing method

HITACHI INT ELECTRIC INC3 citations73
US9425075B2Aug 23, 2016

Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium

HITACHI INT ELECTRIC INC3 citations73
US9330903B2May 3, 2016

Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium

HITACHI INT ELECTRIC INC5 citations73
US9281181B2Mar 8, 2016

Film forming method and recording medium for performing the method

HITACHI INT ELECTRIC INC3 citations73
US9234277B2Jan 12, 2016

Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium

HITACHI INT ELECTRIC INC3 citations73
US9177786B2Nov 3, 2015

Method of manufacturing semiconductor device, method of processing substrate, substrate processing apparatus, and recording medium

HITACHI INT ELECTRIC INC5 citations73
US8785333B2Jul 22, 2014

Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium

HITACHI INT ELECTRIC INC6 citations73

SANO ATSUSHI

10 patents

TDK CORP

6 patents

CANON KK

3 patents

MURATA MANUFACTURING CO

1 patent

DENSO CORP

1 patent

OTA YOSUKE

1 patent

KATO TOMOHIKO

1 patent

NIPPON KOGAKU KK

1 patent

KAWASAKI HEAVY IND LTD

1 patent

Showing the top 50 of 152 patents by PatentIndex Score.