Inventor
CHU SHAO-FU S
US7 patents
Patents
7 patentsUS5015594AMay 14, 1991
Process of making BiCMOS devices having closely spaced device regions
IBM122 citations95
US5521399AMay 28, 1996
Advanced silicon on oxide semiconductor device structure for BiCMOS integrated circuit
IBM24 citations92
US5484738AJan 16, 1996
Method of forming silicon on oxide semiconductor device structure for BiCMOS integrated circuits
IBM34 citations92
US5331199AJul 19, 1994
Bipolar transistor with reduced topography
IBM28 citations91
US5229322AJul 20, 1993
Method of making low resistance substrate or buried layer contact
IBM13 citations72
US5266505ANov 30, 1993
Image reversal process for self-aligned implants in planar epitaxial-base bipolar transistors
IBM15 citations70
US5234846AAug 10, 1993
Method of making bipolar transistor with reduced topography
IBM15 citations70