Inventor

KANG DONG YEL

KR2 patents

Patents

2 patents

US6797963B2Sep 28, 2004

Deflector of a micro-column electron beam apparatus and method for fabricating the same

KOREA ELECTRONICS TELECOMM4 citations58

US7214117B2May 8, 2007

Deflector of a micro-column electron beam apparatus and method for fabricating the same

KOREA ELECTRONICS TELECOMM0 citations48