Inventor

YONEKURA AKIMICHI

JP2 patents

⚠️ This page may combine multiple inventors who share the name “YONEKURA AKIMICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

1 patent

US5316472AMay 31, 1994

Vertical boat used for heat treatment of semiconductor wafer and vertical heat treatment apparatus

TOKYO ELECTRON LTD66 citations93

TOSHIBA KK

1 patent

US5286523AFeb 15, 1994

Method of processing substrates and substrate processing apparatus

TOSHIBA KK4 citations60