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Inventor
MURAGUCHI YOYA
JP
2 patents
⚠️ This page may combine multiple inventors who share the name “MURAGUCHI YOYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON KK
1 patent
US9465303B2
Oct 11, 2016
Exposure apparatus and device manufacturing method
CANON KK
0 citations
46
TAKAGI ATSUSHI
1 patent
US9229313B2
Jan 5, 2016
Exposure apparatus and device manufacturing method
TAKAGI ATSUSHI
0 citations
45