Inventor
ADAIR WILLIAM J
US6 patents
Patents
6 patentsUS5807649ASep 15, 1998
Lithographic patterning method and mask set therefor with light field trim mask
IBM187 citations98
US6184151B1Feb 6, 2001
Method for forming cornered images on a substrate and photomask formed thereby
IBM92 citations97
US5532089AJul 2, 1996
Simplified fabrication methods for rim phase-shift masks
IBM105 citations97
US5959325ASep 28, 1999
Method for forming cornered images on a substrate and photomask formed thereby
IBM43 citations95
US6207333B1Mar 27, 2001
Mask with attenuating phase-shift and opaque regions
IBM48 citations88
US5506080AApr 9, 1996
Lithographic mask repair and fabrication method
IBM19 citations86