Inventor
YUAN CHI-MIN
US11 patents
⚠️ This page may combine multiple inventors who share the name “YUAN CHI-MIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
5 patentsUS5532089AJul 2, 1996
Simplified fabrication methods for rim phase-shift masks
IBM105 citations97
US5465859ANov 14, 1995
Dual phase and hybrid phase shifting mask fabrication using a surface etch monitoring technique
IBM30 citations89
US5620818AApr 15, 1997
Photolithographic dose determination by diffraction of latent image grating
IBM10 citations72
US5556726ASep 17, 1996
Photolithographic dose determination by diffraction of latent image grating
IBM12 citations72
US5476738ADec 19, 1995
Photolithographic dose determination by diffraction of latent image grating
IBM6 citations72
FREESCALE SEMICONDUCTOR INC
5 patentsUS6783904B2Aug 31, 2004
Lithography correction method and device
FREESCALE SEMICONDUCTOR INC27 citations88
US9754966B1Sep 5, 2017
Semiconductor on insulator (SOI) block with a guard ring
FREESCALE SEMICONDUCTOR INC6 citations82
US7284231B2Oct 16, 2007
Layout modification using multilayer-based constraints
FREESCALE SEMICONDUCTOR INC15 citations80
US9547742B2Jan 17, 2017
Systems and methods for via placement
FREESCALE SEMICONDUCTOR INC2 citations72
US9009644B1Apr 14, 2015
Automatic generation of via definitions based on manufacturability
FREESCALE SEMICONDUCTOR INC1 citations51