Inventor

DOAN KENNY

US4 patents

⚠️ This page may combine multiple inventors who share the name “DOAN KENNY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

3 patents

US6273022B1Aug 14, 2001

Distributed inductively-coupled plasma source

APPLIED MATERIALS INC96 citations97

US6568346B2May 27, 2003

Distributed inductively-coupled plasma source and circuit for coupling induction coils to RF power supply

APPLIED MATERIALS INC66 citations95

US10546731B1Jan 28, 2020

Method, apparatus and system for wafer dechucking using dynamic voltage sweeping

APPLIED MATERIALS INC1 citations61

(unassigned)

1 patent

US6825618B2Nov 30, 2004

Distributed inductively-coupled plasma source and circuit for coupling induction coils to RF power supply

60 citations94