Inventor

KAWAMURA YOSHIO

JP51 patents

⚠️ This page may combine multiple inventors who share the name “KAWAMURA YOSHIO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KAWAMURA YOSHIO

HITACHI LTD

Fabrication system and fabrication method

Semiconductor manufacturing apparatus for transferring articles with a bearing-less joint and method for manufacturing semiconductor device

Fabrication system and method having inter-apparatus transporter

Polishing method

Chamber plate for use in cell fusion and a process for production thereof

Pattern forming apparatus

Method and apparatus for fabricating semiconductor devices

Valve and semiconductor fabricating equipment using the same

Fabrication system and method having inter-apparatus transporter

Wafer transport method

Cell handling method for cell fusion processor

Angular velocity and acceleration sensor

Pattern detecting apparatus

Processing method and equipment for processing a semiconductor device having holder/carrier with flattened surface

Optical exposure apparatus

Valve and semiconductor fabricating equipment using the same

Cell manipulating apparatus

Pattern printing method and apparatus

Semiconductor device fabricating method

Wafer transport method

Pattern detector

Pattern generator

Biological cell treatment method and apparatus

Lithography apparatus

Method and apparatus for planarizing semiconductor device

Semiconductor device fabricating method

Method for polishing surface of semiconductor device substrate

Semiconductor manufacturing apparatus for transferring articles with a bearing-less joint and method for manufacturing semiconductor device

Automatic focusing apparatus

Automatic focusing apparatus

Method for fabricating semiconductor device and processing apparatus for processing semiconductor device

Information recording disk, its production method and recording apparatus

Cell handling apparatus

Method of polishing a semiconductor device

Pattern detector

Photoelectric microscope

Processing method, measuring method and producing method of semiconductor devices

RENESAS TECH CORP

Fabrication system and fabrication method

Fabrication system and fabrication method

Fabrication system and fabrication method

Fabrication system and fabrication method

Planarizing method of semiconductor wafer and apparatus thereof

DENSO CORP

Structure of robot control system

Motor control apparatus

KAWASAKI HEAVY IND LTD

Suction air muffler for a motorcycle

Air cleaner

AGENCY IND SCIENCE TECHN

Fluidized bed combustor

Gas circulating combustion means

HIROSE ELECTRIC CO LTD

Apparatus for connection of multicore cable

AGENCY FOR IND SCIENCE & TECHN

Combustion apparatus