Inventor
YAMAMOTO TATUHARU
JP4 patents
Patents
4 patentsUS6518548B2Feb 11, 2003
Substrate temperature control system and method for controlling temperature of substrate
HITACHI LTD269 citations98
US6394797B1May 28, 2002
Substrate temperature control system and method for controlling temperature of substrate
HITACHI LTD182 citations98
US5981399ANov 9, 1999
Method and apparatus for fabricating semiconductor devices
HITACHI LTD114 citations97
US5628828AMay 13, 1997
Processing method and equipment for processing a semiconductor device having holder/carrier with flattened surface
HITACHI LTD82 citations95