Inventor
UCHIDA FUMIHIKO
JP16 patents
⚠️ This page may combine multiple inventors who share the name “UCHIDA FUMIHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
12 patentsUS6099598AAug 8, 2000
Fabrication system and fabrication method
HITACHI LTD99 citations99
US5820679AOct 13, 1998
Fabrication system and method having inter-apparatus transporter
HITACHI LTD144 citations99
US5981399ANov 9, 1999
Method and apparatus for fabricating semiconductor devices
HITACHI LTD114 citations97
US5858863AJan 12, 1999
Fabrication system and method having inter-apparatus transporter
HITACHI LTD63 citations96
US5562800AOct 8, 1996
Wafer transport method
HITACHI LTD69 citations96
US5416331AMay 16, 1995
Surface atom fabrication method and apparatus
HITACHI LTD69 citations96
US5628828AMay 13, 1997
Processing method and equipment for processing a semiconductor device having holder/carrier with flattened surface
HITACHI LTD82 citations95
US5689494ANov 18, 1997
Surface atom fabrication method and apparatus
HITACHI LTD22 citations92
US5601686AFeb 11, 1997
Wafer transport method
HITACHI LTD26 citations92
US5411430AMay 2, 1995
Scanning optical device and method for making a hybrid scanning lens used therefor
HITACHI LTD31 citations92
US4739161AApr 19, 1988
Fine displacement transducer employing plural optical fibers
HITACHI LTD14 citations74
US4380917AApr 26, 1983
Tube-bending machine
HITACHI LTD17 citations72
RENESAS TECH CORP
4 patentsUS7062344B2Jun 13, 2006
Fabrication system and fabrication method
RENESAS TECH CORP32 citations96
US7603194B2Oct 13, 2009
Fabrication system and fabrication method
RENESAS TECH CORP6 citations74
US7392106B2Jun 24, 2008
Fabrication system and fabrication method
RENESAS TECH CORP8 citations74
US7310563B2Dec 18, 2007
Fabrication system and fabrication method
RENESAS TECH CORP6 citations74