Inventor
HAYASHI TATUSYA
JP2 patents
Patents
2 patentsUS11249394B2Feb 15, 2022
Imprint methods for forming a pattern of an imprint material on a substrate-side pattern region of a substrate by using a mold, and related device manufacturing methods
CANON KK2 citations71
US10663858B2May 26, 2020
Imprint apparatus that forms a pattern of an imprint material on a substrate-side pattern region of a substrate using a mold, and related methods
CANON KK2 citations71