P

Inventor

KOBAYASHI NAOYUKI

JP58 patents
⚠️ This page may combine multiple inventors who share the name “KOBAYASHI NAOYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NIKON CORP

22 patents
US7388649B2Jun 17, 2008

Exposure apparatus and method for producing device

NIKON CORP121 citations99
US7589820B2Sep 15, 2009

Exposure apparatus and method for producing device

NIKON CORP49 citations96
US6002987ADec 14, 1999

Methods to control the environment and exposure apparatus

NIKON CORP76 citations96
US5973773AOct 26, 1999

Lens distortion measurement using moire fringes

NIKON CORP44 citations96
US5587794ADec 24, 1996

Surface position detection apparatus

NIKON CORP45 citations96
US7505115B2Mar 17, 2009

Exposure apparatus, method for producing device, and method for controlling exposure apparatus

NIKON CORP19 citations93
US6124933ASep 26, 2000

Exposure apparatus utilizing surface position detection, method thereof, and semiconductor device production method using the apparatus

NIKON CORP20 citations93
US5801835ASep 1, 1998

Surface position detection apparatus and method

NIKON CORP25 citations93
US5767959AJun 16, 1998

Lens distortion measurement using moire fringes

NIKON CORP22 citations93
US7242455B2Jul 10, 2007

Exposure apparatus and method for producing device

NIKON CORP32 citations92
US5870197AFeb 9, 1999

Precision stage interferometer system with local single air duct

NIKON CORP23 citations92
US9304392B2Apr 5, 2016

Exposure apparatus and method for producing device

NIKON CORP4 citations84
US8760617B2Jun 24, 2014

Exposure apparatus and method for producing device

NIKON CORP4 citations84
US8749757B2Jun 10, 2014

Exposure apparatus, method for producing device, and method for controlling exposure apparatus

NIKON CORP4 citations83
US8384877B2Feb 26, 2013

Exposure apparatus and method for producing device

NIKON CORP4 citations74
US9939739B2Apr 10, 2018

Exposure apparatus and method for producing device

NIKON CORP2 citations73
US9760026B2Sep 12, 2017

Exposure apparatus, method for producing device, and method for controlling exposure apparatus

NIKON CORP2 citations73
US9494871B2Nov 15, 2016

Exposure apparatus, method for producing device, and method for controlling exposure apparatus

NIKON CORP2 citations63
US9316921B2Apr 19, 2016

Exposure apparatus, exposure method, and method for producing device

NIKON CORP2 citations63
US7834976B2Nov 16, 2010

Exposure apparatus and method for producing device

NIKON CORP2 citations63
US7817244B2Oct 19, 2010

Exposure apparatus and method for producing device

NIKON CORP2 citations63
US6008883ADec 28, 1999

Apparatus and method for exposure

NIKON CORP2 citations63

KOBAYASHI NAOYUKI

10 patents

JSW AKTINA SYSTEM CO LTD

3 patents

PANASONIC CORP

2 patents

HENKEL CORP

2 patents

JAPAN STEEL WORKS LTD

2 patents

SANTEN PHARMACEUTICAL CO LTD

2 patents

TABATA KENICHIRO

1 patent

NIPPON ZEON CO

1 patent

MAGOME NOBUTAKA

1 patent

NIHON PARKERIZING

1 patent

YUMEX CORP

1 patent

NEI MASAHIRO

1 patent

NATIONAL UNIV CORPORATION ASAHIKAWA MEDICAL UNIV

1 patent

Showing the top 50 of 58 patents by PatentIndex Score.