Inventor
TANABE MASARU
JP40 patents
⚠️ This page may combine multiple inventors who share the name “TANABE MASARU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HOYA CORP
22 patentsUS6610994B1Aug 26, 2003
Method of checking unevenness of light-transmitting substance, apparatus therefor, and method of sorting transparent substrates
HOYA CORP22 citations92
US7592104B2Sep 22, 2009
Mask blank substrate, mask blank, exposure mask, mask blank substrate manufacturing method, and semiconductor manufacturing method
HOYA CORP10 citations82
US6555273B2Apr 29, 2003
Glass substrate for an electron device, photomask blank and photomask using the same
HOYA CORP9 citations74
US9690189B2Jun 27, 2017
Mask blank substrate, mask blank, transfer mask, and method of manufacturing semiconductor device
HOYA CORP2 citations73
US8048593B2Nov 1, 2011
Mask blank substrate, mask blank, photomask, and methods of manufacturing the same
HOYA CORP4 citations63
US8007961B2Aug 30, 2011
Mask blank substrate set and mask blank set
HOYA CORP2 citations63
US7898650B2Mar 1, 2011
Inspection method for transparent article
HOYA CORP2 citations63
US6861659B2Mar 1, 2005
Method of inspecting ununiformity of transparent material, apparatus therefor, and method of selecting transparent substrate
HOYA CORP5 citations63
US12468220B2Nov 11, 2025
Mask blank substrate, substrate with multilayer reflective film, reflective mask blank, reflective mask, and method of manufacturing semiconductor device
HOYA CORP0 citations62
US8039178B2Oct 18, 2011
Manufacturing method of transparent substrate for mask blanks, manufacturing method of mask blanks, manufacturing method of exposure masks, manufacturing method of semiconductor devices, manufacturing method of liquid crystal display devices, and defect correction method of exposure masks
HOYA CORP4 citations62
US7892708B2Feb 22, 2011
Mask blank substrate, mask blank, exposure mask, mask blank substrate manufacturing method, and semiconductor manufacturing method
HOYA CORP1 citations61
US7745074B2Jun 29, 2010
Mask blank substrate, mask blank, exposure mask, mask blank substrate manufacturing method, and semiconductor manufacturing method
HOYA CORP1 citations61
US7998644B2Aug 16, 2011
Mask blank providing system, mask blank providing method, mask blank transparent substrate manufacturing method, mask blank manufacturing method, and mask manufacturing method
HOYA CORP1 citations60
US7700244B2Apr 20, 2010
Mask blank providing system, mask blank providing method, mask blank transparent substrate manufacturing method, mask blank manufacturing method, and mask manufacturing method
HOYA CORP1 citations60
US10983427B2Apr 20, 2021
Method for manufacturing a mask blank substrate, method for manufacturing a mask blank, method for manufacturing a transfer mask, method for manufacturing a semiconductor device, a mask blank substrate, a mask blank, and a transfer mask
HOYA CORP0 citations52
US10168613B2Jan 1, 2019
Mask blank substrate, mask blank, transfer mask, and method of manufacturing semiconductor device
HOYA CORP0 citations52
US8609307B2Dec 17, 2013
Thin film evaluation method, mask blank, and transfer mask
HOYA CORP0 citations52
US8026025B2Sep 27, 2011
Mask blank transparent substrate manufacturing method, mask blank manufacturing method, and exposure mask manufacturing method
HOYA CORP0 citations52
US7901840B2Mar 8, 2011
Mask blank transparent substrate manufacturing method, mask blank manufacturing method, and exposure mask manufacturing method
HOYA CORP0 citations52
US7862960B2Jan 4, 2011
Manufacturing method of transparent substrate for mask blanks, manufacturing method of mask blanks, manufacturing method of exposure masks, manufacturing method of semiconductor devices, manufacturing method of liquid crystal display devices, and defect correction method of exposure masks
HOYA CORP0 citations52
US7972702B2Jul 5, 2011
Defect inspection method for a glass substrate for a mask blank, glass substrate for a mask blank, mask blank, exposure mask, method of producing a glass substrate for a mask blank, method of producing a mask blank, and method of producing an exposure mask
HOYA CORP0 citations42
US10578961B2Mar 3, 2020
Mask blank substrate, multi-layer reflective film coated substrate, and mask blank
HOYA CORP0 citations41
TANABE MASARU
10 patentsUS8455158B2Jun 4, 2013
Method of manufacturing a substrate for a mask blank, method of manufacturing a mask blank, method of manufacturing a transfer mask, and method of manufacturing a semiconductor device
TANABE MASARU2 citations62
US8142963B2Mar 27, 2012
Methods of manufacturing a mask blank substrate, a mask blank, a photomask, and a semiconductor device
TANABE MASARU5 citations62
US8609304B2Dec 17, 2013
Method of manufacturing a transfer mask and method of manufacturing a semiconductor device
TANABE MASARU4 citations57
US8709683B2Apr 29, 2014
Photomask blank, photomask blank manufacturing method, and photomask manufacturing method
TANABE MASARU0 citations51
US8592106B2Nov 26, 2013
Methods of manufacturing a mask blank substrate, a mask blank, a photomask, and a semiconductor device
TANABE MASARU0 citations51
US8440373B2May 14, 2013
Mask blank substrate, mask blank, photomask, and methods of manufacturing the same
TANABE MASARU0 citations51
US8318387B2Nov 27, 2012
Mask blank substrate set and mask blank set
TANABE MASARU0 citations51
US8197992B2Jun 12, 2012
Photomask blank, photomask blank manufacturing method, and photomask manufacturing method
TANABE MASARU0 citations51
US8107063B2Jan 31, 2012
Transparent article
TANABE MASARU0 citations51
US8785085B2Jul 22, 2014
Method of manufacturing a mask blank substrate, method of manufacturing a mask blank, method of manufacturing a transfer mask, and method of manufacturing a semiconductor device
TANABE MASARU0 citations41
MITSUI CHEMICALS INC
5 patentsUS6593408B1Jul 15, 2003
Organic polymer/inorganic fine particle-dispersed aqueous solution having excellent stability and uses thereof
MITSUI CHEMICALS INC38 citations92
US6359093B1Mar 19, 2002
Amphipathic compound having succinic acid skeleton
MITSUI CHEMICALS INC18 citations90
US6683720B2Jan 27, 2004
Reflector, sidelight type backlighting apparatus and reflector substrate
MITSUI CHEMICALS INC16 citations84
US5872287AFeb 16, 1999
Amphipathic compound having succinic acid skeleton
MITSUI CHEMICALS INC5 citations71
US6057412AMay 2, 2000
Amphipathic compound having succinic acid skeleton
MITSUI CHEMICALS INC0 citations51