P

Inventor

TANABE MASARU

JP40 patents
⚠️ This page may combine multiple inventors who share the name “TANABE MASARU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HOYA CORP

22 patents
US6610994B1Aug 26, 2003

Method of checking unevenness of light-transmitting substance, apparatus therefor, and method of sorting transparent substrates

HOYA CORP22 citations92
US7592104B2Sep 22, 2009

Mask blank substrate, mask blank, exposure mask, mask blank substrate manufacturing method, and semiconductor manufacturing method

HOYA CORP10 citations82
US6555273B2Apr 29, 2003

Glass substrate for an electron device, photomask blank and photomask using the same

HOYA CORP9 citations74
US9690189B2Jun 27, 2017

Mask blank substrate, mask blank, transfer mask, and method of manufacturing semiconductor device

HOYA CORP2 citations73
US8048593B2Nov 1, 2011

Mask blank substrate, mask blank, photomask, and methods of manufacturing the same

HOYA CORP4 citations63
US8007961B2Aug 30, 2011

Mask blank substrate set and mask blank set

HOYA CORP2 citations63
US7898650B2Mar 1, 2011

Inspection method for transparent article

HOYA CORP2 citations63
US6861659B2Mar 1, 2005

Method of inspecting ununiformity of transparent material, apparatus therefor, and method of selecting transparent substrate

HOYA CORP5 citations63
US12468220B2Nov 11, 2025

Mask blank substrate, substrate with multilayer reflective film, reflective mask blank, reflective mask, and method of manufacturing semiconductor device

HOYA CORP0 citations62
US8039178B2Oct 18, 2011

Manufacturing method of transparent substrate for mask blanks, manufacturing method of mask blanks, manufacturing method of exposure masks, manufacturing method of semiconductor devices, manufacturing method of liquid crystal display devices, and defect correction method of exposure masks

HOYA CORP4 citations62
US7892708B2Feb 22, 2011

Mask blank substrate, mask blank, exposure mask, mask blank substrate manufacturing method, and semiconductor manufacturing method

HOYA CORP1 citations61
US7745074B2Jun 29, 2010

Mask blank substrate, mask blank, exposure mask, mask blank substrate manufacturing method, and semiconductor manufacturing method

HOYA CORP1 citations61
US7998644B2Aug 16, 2011

Mask blank providing system, mask blank providing method, mask blank transparent substrate manufacturing method, mask blank manufacturing method, and mask manufacturing method

HOYA CORP1 citations60
US7700244B2Apr 20, 2010

Mask blank providing system, mask blank providing method, mask blank transparent substrate manufacturing method, mask blank manufacturing method, and mask manufacturing method

HOYA CORP1 citations60
US10983427B2Apr 20, 2021

Method for manufacturing a mask blank substrate, method for manufacturing a mask blank, method for manufacturing a transfer mask, method for manufacturing a semiconductor device, a mask blank substrate, a mask blank, and a transfer mask

HOYA CORP0 citations52
US10168613B2Jan 1, 2019

Mask blank substrate, mask blank, transfer mask, and method of manufacturing semiconductor device

HOYA CORP0 citations52
US8609307B2Dec 17, 2013

Thin film evaluation method, mask blank, and transfer mask

HOYA CORP0 citations52
US8026025B2Sep 27, 2011

Mask blank transparent substrate manufacturing method, mask blank manufacturing method, and exposure mask manufacturing method

HOYA CORP0 citations52
US7901840B2Mar 8, 2011

Mask blank transparent substrate manufacturing method, mask blank manufacturing method, and exposure mask manufacturing method

HOYA CORP0 citations52
US7862960B2Jan 4, 2011

Manufacturing method of transparent substrate for mask blanks, manufacturing method of mask blanks, manufacturing method of exposure masks, manufacturing method of semiconductor devices, manufacturing method of liquid crystal display devices, and defect correction method of exposure masks

HOYA CORP0 citations52
US7972702B2Jul 5, 2011

Defect inspection method for a glass substrate for a mask blank, glass substrate for a mask blank, mask blank, exposure mask, method of producing a glass substrate for a mask blank, method of producing a mask blank, and method of producing an exposure mask

HOYA CORP0 citations42
US10578961B2Mar 3, 2020

Mask blank substrate, multi-layer reflective film coated substrate, and mask blank

HOYA CORP0 citations41

TANABE MASARU

10 patents

MITSUI CHEMICALS INC

5 patents

NCR CO

1 patent

SUZUKI OSAMU

1 patent

SAKAI KAZUYA

1 patent