Inventor
KIKUTA RITSUO
JP7 patents
Patents
7 patentsUS5830045ANov 3, 1998
Polishing apparatus
EBARA CORP95 citations97
US5716264AFeb 10, 1998
Polishing apparatus
EBARA CORP108 citations97
US6283822B1Sep 4, 2001
Polishing apparatus
EBARA CORP19 citations92
US5651725AJul 29, 1997
Apparatus and method for polishing workpiece
EBARA CORP37 citations92
US4943214AJul 24, 1990
Two-shaft type rotary machine having a tip circle diameter to shaft diameter within a certain range
EBARA CORP20 citations77
US6942541B2Sep 13, 2005
Polishing apparatus
EBARA CORP9 citations73
US5985090ANov 16, 1999
Polishing cloth and polishing apparatus having such polishing cloth
EBARA CORP16 citations72