Inventor

AOYAMA FUJIO

JP3 patents

Patents

3 patents

US5643056AJul 1, 1997

Revolving drum polishing apparatus

EBARA CORP26 citations91

US6802099B2Oct 12, 2004

Cleaning member and cylindrical cleaning element

EBARA CORP18 citations80

US5985090ANov 16, 1999

Polishing cloth and polishing apparatus having such polishing cloth

EBARA CORP16 citations72