Inventor
TAKAHASHI TAMAMI
JP48 patents
⚠️ This page may combine multiple inventors who share the name “TAKAHASHI TAMAMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA CORP
36 patentsUS5672091ASep 30, 1997
Polishing apparatus having endpoint detection device
EBARA CORP212 citations98
US5882244AMar 16, 1999
Polishing apparatus
EBARA CORP65 citations96
US5639388AJun 17, 1997
Polishing endpoint detection method
EBARA CORP101 citations96
US5704827AJan 6, 1998
Polishing apparatus including cloth cartridge connected to turntable
EBARA CORP67 citations95
US9108162B2Aug 18, 2015
Seawater desalination system and energy exchange chamber
EBARA CORP28 citations93
USD616389SMay 25, 2010
Vacuum contact pad
EBARA CORP41 citations93
US6648014B1Nov 18, 2003
Fluid control valve and plate with filter
EBARA CORP26 citations92
US5830041ANov 3, 1998
Method and apparatus for determining endpoint during a polishing process
EBARA CORP49 citations92
US5679064AOct 21, 1997
Polishing apparatus including detachable cloth cartridge
EBARA CORP33 citations92
US5651725AJul 29, 1997
Apparatus and method for polishing workpiece
EBARA CORP37 citations92
US5846335ADec 8, 1998
Method for cleaning workpiece
EBARA CORP40 citations91
US5944042AAug 31, 1999
Flow force compensating method and flow control valve of spool type using the same method
EBARA CORP27 citations90
US5785087AJul 28, 1998
Water hydraulic proportional control valve
EBARA CORP45 citations90
US8047896B2Nov 1, 2011
Polishing apparatus, polishing method, and processing apparatus
EBARA CORP11 citations84
US7976361B2Jul 12, 2011
Polishing apparatus and polishing method
EBARA CORP8 citations84
US8029333B2Oct 4, 2011
Device for polishing peripheral edge of semiconductor wafer
EBARA CORP11 citations83
US6659121B1Dec 9, 2003
Solenoid and hydraulic control valve
EBARA CORP19 citations83
US6453773B1Sep 24, 2002
Elevation and index apparatus of water hydraulic driven type
EBARA CORP17 citations82
US10207224B2Feb 19, 2019
Seawater desalination system and energy recovery apparatus
EBARA CORP2 citations73
US10166647B2Jan 1, 2019
Polishing apparatus and polishing method
EBARA CORP2 citations73
US6102786AAug 15, 2000
Polishing apparatus including turntable with polishing surface of different heights
EBARA CORP12 citations73
US5888126AMar 30, 1999
Polishing apparatus including turntable with polishing surface of different heights
EBARA CORP15 citations73
US10137552B2Nov 27, 2018
Polishing apparatus
EBARA CORP2 citations72
US9649739B2May 16, 2017
Polishing apparatus
EBARA CORP2 citations72
US5985090ANov 16, 1999
Polishing cloth and polishing apparatus having such polishing cloth
EBARA CORP16 citations72
US10134614B2Nov 20, 2018
Substrate peripheral portion measuring device, and substrate peripheral portion polishing apparatus
EBARA CORP2 citations69
US9517544B2Dec 13, 2016
Polishing apparatus and polishing method
EBARA CORP2 citations63
USD752507SMar 29, 2016
Energy exchange chamber
EBARA CORP2 citations63
US6889730B2May 10, 2005
Hydraulic drive system
EBARA CORP4 citations60
USD733042SJun 30, 2015
Energy exchange chamber
EBARA CORP0 citations52
US10232315B2Mar 19, 2019
Seawater desalination system and energy recovery apparatus
EBARA CORP0 citations51
US10124295B2Nov 13, 2018
Seawater desalination system and energy recovery apparatus
EBARA CORP0 citations51
US10005034B2Jun 26, 2018
Seawater desalination system and energy recovery apparatus
EBARA CORP0 citations51
US10532321B2Jan 14, 2020
Seawater desalination system and energy recovery device
EBARA CORP0 citations42
US10065152B2Sep 4, 2018
Seawater desalination system and energy recovery apparatus
EBARA CORP0 citations41
USRE39262ESep 5, 2006
Polishing apparatus including turntable with polishing surface of different heights
EBARA CORP0 citations41
TAKAHASHI TAMAMI
8 patentsUSD649126SNov 22, 2011
Vacuum contact pad
TAKAHASHI TAMAMI54 citations98
US9287158B2Mar 15, 2016
Substrate processing apparatus
TAKAHASHI TAMAMI7 citations84
USD650344SDec 13, 2011
Vacuum contact pad
TAKAHASHI TAMAMI8 citations84
US9011688B2Apr 21, 2015
Seawater desalination system and energy exchange chamber
TAKAHASHI TAMAMI15 citations83
US8187055B2May 29, 2012
Polishing apparatus and polishing method
TAKAHASHI TAMAMI11 citations83
US8771510B2Jul 8, 2014
Seawater desalination system and energy exchange chamber
TAKAHASHI TAMAMI14 citations82
US8506363B2Aug 13, 2013
Substrate holder and substrate holding method
TAKAHASHI TAMAMI6 citations72
US8986069B2Mar 24, 2015
Polishing apparatus and polishing method
TAKAHASHI TAMAMI2 citations62