Inventor
MATSUNAGA KOICHI
JP9 patents
⚠️ This page may combine multiple inventors who share the name “MATSUNAGA KOICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
5 patentsUS9418834B2Aug 16, 2016
System and methods for spin-on coating of self-assembled monolayers or periodic organosilicates on a substrate
TOKYO ELECTRON LTD5 citations66
US11126086B2Sep 21, 2021
Substrate treatment apparatus, substrate treatment method, and computer storage medium
TOKYO ELECTRON LTD0 citations50
US12547076B2Feb 10, 2026
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD0 citations49
US12116670B2Oct 15, 2024
Substrate processing method and substrate processing apparatus
TOKYO ELECTRON LTD0 citations49
US12409470B2Sep 9, 2025
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD0 citations47