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Inventor
NARAWANKAR PRAVIN
US
2 patents
Patents
2 patents
US6375744B2
Apr 23, 2002
Sequential in-situ heating and deposition of halogen-doped silicon oxide
APPLIED MATERIALS INC
17 citations
91
US6228781B1
May 8, 2001
Sequential in-situ heating and deposition of halogen-doped silicon oxide
APPLIED MATERIALS INC
25 citations
91