Inventor
SENZAKI YOSHIHIDE
US20 patents
⚠️ This page may combine multiple inventors who share the name “SENZAKI YOSHIHIDE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
AIR PROD & CHEM
8 patentsUS6537613B1Mar 25, 2003
Process for metal metalloid oxides and nitrides with compositional gradients
AIR PROD & CHEM155 citations99
US6238734B1May 29, 2001
Liquid precursor mixtures for deposition of multicomponent metal containing materials
AIR PROD & CHEM570 citations99
US6616972B1Sep 9, 2003
Synthesis of metal oxide and oxynitride
AIR PROD & CHEM27 citations92
US6503561B1Jan 7, 2003
Liquid precursor mixtures for deposition of multicomponent metal containing materials
AIR PROD & CHEM40 citations92
US6319567B1Nov 20, 2001
Synthesis of tantalum nitride
AIR PROD & CHEM18 citations92
US6500499B1Dec 31, 2002
Deposition and annealing of multicomponent ZrSnTi and HfSnTi oxide thin films using solventless liquid mixture of precursors
AIR PROD & CHEM14 citations83
US6096913AAug 1, 2000
Production of metal-ligand complexes
AIR PROD & CHEM7 citations74
US6046364AApr 4, 2000
Regeneration of metal CVD precursors
AIR PROD & CHEM2 citations61
AVIZA TECH INC
5 patentsUS6713846B1Mar 30, 2004
Multilayer high κ dielectric films
AVIZA TECH INC230 citations98
US7205247B2Apr 17, 2007
Atomic layer deposition of hafnium-based high-k dielectric
AVIZA TECH INC563 citations96
US7335569B2Feb 26, 2008
In-situ formation of metal insulator metal capacitors
AVIZA TECH INC15 citations84
US7470470B2Dec 30, 2008
System and method for forming multi-component dielectric films
AVIZA TECH INC12 citations77
US6933011B2Aug 23, 2005
Two-step atomic layer deposition of copper layers
AVIZA TECH INC4 citations62