Inventor
LEE EVANS Y
US12 patents
⚠️ This page may combine multiple inventors who share the name “LEE EVANS Y”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
10 patentsUS6716302B2Apr 6, 2004
Dielectric etch chamber with expanded process window
APPLIED MATERIALS INC91 citations98
US6192827B1Feb 27, 2001
Double slit-valve doors for plasma processing
APPLIED MATERIALS INC108 citations98
US6916399B1Jul 12, 2005
Temperature controlled window with a fluid supply system
APPLIED MATERIALS INC168 citations96
US6797639B2Sep 28, 2004
Dielectric etch chamber with expanded process window
APPLIED MATERIALS INC63 citations96
US7147719B2Dec 12, 2006
Double slit-valve doors for plasma processing
APPLIED MATERIALS INC17 citations92
US6513452B2Feb 4, 2003
Adjusting DC bias voltage in plasma chamber
APPLIED MATERIALS INC29 citations92
US6221782B1Apr 24, 2001
Adjusting DC bias voltage in plasma chamber
APPLIED MATERIALS INC31 citations92
US7374636B2May 20, 2008
Method and apparatus for providing uniform plasma in a magnetic field enhanced plasma reactor
APPLIED MATERIALS INC21 citations91
US7316199B2Jan 8, 2008
Method and apparatus for controlling the magnetic field intensity in a plasma enhanced semiconductor wafer processing chamber
APPLIED MATERIALS INC9 citations83
US6647918B1Nov 18, 2003
Double slit-valve doors for plasma processing
APPLIED MATERIALS INC13 citations83