Inventor
WU ROBERT W
US18 patents
⚠️ This page may combine multiple inventors who share the name “WU ROBERT W”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
15 patentsUS6308654B1Oct 30, 2001
Inductively coupled parallel-plate plasma reactor with a conical dome
APPLIED MATERIALS INC206 citations99
US6074959AJun 13, 2000
Method manifesting a wide process window and using hexafluoropropane or other hydrofluoropropanes to selectively etch oxide
APPLIED MATERIALS INC123 citations98
US5904778AMay 18, 1999
Silicon carbide composite article particularly useful for plasma reactors
APPLIED MATERIALS INC146 citations97
US6183655B1Feb 6, 2001
Tunable process for selectively etching oxide using fluoropropylene and a hydrofluorocarbon
APPLIED MATERIALS INC52 citations96
US6009830AJan 4, 2000
Independent gas feeds in a plasma reactor
APPLIED MATERIALS INC135 citations96
US5910221AJun 8, 1999
Bonded silicon carbide parts in a plasma reactor
APPLIED MATERIALS INC63 citations96
US5986875ANov 16, 1999
Puncture resistant electrostatic chuck
APPLIED MATERIALS INC42 citations95
US5891350AApr 6, 1999
Adjusting DC bias voltage in plasma chambers
APPLIED MATERIALS INC186 citations95
US5729423AMar 17, 1998
Puncture resistant electrostatic chuck
APPLIED MATERIALS INC57 citations95
US6513452B2Feb 4, 2003
Adjusting DC bias voltage in plasma chamber
APPLIED MATERIALS INC29 citations92
US6432318B1Aug 13, 2002
Dielectric etch process reducing striations and maintaining critical dimensions
APPLIED MATERIALS INC24 citations92
US6221782B1Apr 24, 2001
Adjusting DC bias voltage in plasma chamber
APPLIED MATERIALS INC31 citations92
US5965463AOct 12, 1999
Silane etching process
APPLIED MATERIALS INC44 citations92
US6379574B1Apr 30, 2002
Integrated post-etch treatment for a dielectric etch process
APPLIED MATERIALS INC31 citations87
US6361705B1Mar 26, 2002
Plasma process for selectively etching oxide using fluoropropane or fluoropropylene
APPLIED MATERIALS INC7 citations72