Inventor

CARDUCCI JAMES D

US77 patents

⚠️ This page may combine multiple inventors who share the name “CARDUCCI JAMES D”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CARDUCCI JAMES D

APPLIED MATERIALS INC

Symmetric plasma process chamber

Symmetric plasma process chamber

Symmetric plasma process chamber

Symmetric plasma process chamber

Symmetric plasma process chamber

Distributed electrode array for plasma processing

Gas distribution showerhead for semiconductor processing

Capacitively coupled plasma reactor with uniform radial distribution of plasma

Dielectric etch chamber with expanded process window

Double slit-valve doors for plasma processing

Dielectric etch chamber with expanded process window

Plasma reactor with a tri-magnet plasma confinement apparatus

Lower liner with integrated flow equalizer and improved conductance

Double slit-valve doors for plasma processing

Configurable single substrate wet-dry integrated cluster cleaner

Adjusting DC bias voltage in plasma chamber

Adjusting DC bias voltage in plasma chamber

Symmetric VHF source for a plasma reactor

Diamond like carbon layer formed by an electron beam plasma process

Ion-ion plasma atomic layer etch process and reactor

Distributed electrode array for plasma processing

Symmetrical inductively coupled plasma source with coaxial RF feed and coaxial shielding

Multiple coil inductively coupled plasma source with offset frequencies and double-walled shielding

Symmetric VHF source for a plasma reactor

Symmetrical inductively coupled plasma source with symmetrical flow chamber

Symmetrical inductively coupled plasma source with side RF feeds and RF distribution plates

Apparatus and method to confine plasma and reduce flow resistance in a plasma reactor

Apparatus and method to confine plasma and reduce flow resistance in a plasma

Apparatus and method to confine plasma and reduce flow resistance in a plasma reactor

Configurable single substrate wet-dry integrated cluster cleaner

Double slit-valve doors for plasma processing

Continuous liner for use in a processing chamber

Continuous liner for use in a processing chamber

Symmetric plasma process chamber

Plasma reactor with electrode array in ceiling

Ion-ion plasma atomic layer etch process

Symmetric VHF source for a plasma reactor

Gas distribution plate assembly for high power plasma etch processes

Symmetrical plural-coil plasma source with side RF feeds and RF distribution plates

Symmetric plasma process chamber

CARDUCCI JAMES D

Temperature controlled chamber liner

Lower liner with integrated flow equalizer and improved conductance

Lower liner with integrated flow equalizer and improved conductance

Lower liner with integrated flow equalizer and improved conductance

Etching chamber having flow equalizer and lower liner

BAHNG KENNETH J

Apparatus for efficient removal of halogen residues from etched substrates

CARDUCCI DUAL SPORT LLC

Motorcycle

COLLINS KENNETH S

Symmetric VHF plasma power coupler with active uniformity steering

RAMASWAMY KARTIK

Symmetric VHF source for a plasma reactor

NOORBAKHSH HAMID

Reconfigurable multi-zone gas delivery hardware for substrate processing showerheads