Inventor
YOCUM TROY A
US6 patents
Patents
6 patentsUS6939795B2Sep 6, 2005
Selective dry etching of tantalum and tantalum nitride
TEXAS INSTRUMENTS INC19 citations91
US6551943B1Apr 22, 2003
Wet clean of organic silicate glass films
TEXAS INSTRUMENTS INC16 citations82
US6316350B1Nov 13, 2001
Post fuse slag etch
TEXAS INSTRUMENTS INC10 citations72
US7354853B2Apr 8, 2008
Selective dry etching of tantalum and tantalum nitride
TEXAS INSTRUMENTS INC2 citations61
US6686283B1Feb 3, 2004
Shallow trench isolation planarization using self aligned isotropic etch
TEXAS INSTRUMENTS INC4 citations57
US6905943B2Jun 14, 2005
Forming a trench to define one or more isolation regions in a semiconductor structure
TEXAS INSTRUMENTS INC1 citations49