Inventor

SAKUMA NORIYUKI

JP56 patents

⚠️ This page may combine multiple inventors who share the name “SAKUMA NORIYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SAKUMA NORIYUKI

HITACHI LTD

Polishing method

Methods of polishing, interconnect-fabrication, and producing semiconductor devices

Method for manufacturing a semiconductor device

Polishing method

Method of polishing

Semiconductor device

Semiconductor device and method for manufacturing the same

Apparatus and method for producing substrate with electrical wire thereon

Polishing apparatus using substantially abrasive-free liquid with mixture unit near polishing unit, and plant using the polishing apparatus

Process for producing a semiconductor device

Semiconductor capacitor device with dual dielectric

Semiconductor device

Semiconductor device and process for producing the same

Semiconductor device and process for producing the same

Thermal type fluid flow sensor

Flow sensor with metal film resistor

Flow sensor using a heat element and a resistance temperature detector formed of a metal film

Polishing method

Semiconductor memory device

Acceleration sensor

Inertial sensor

Thermal type fluid flow sensor with metal film resistor

Semiconductor device

Polishing method

Semiconductor device

Acceleration sensor

Acceleration sensor including improved mass body

Manufacturing method of MEMS sensor

Acceleration sensor, geophone, and seismic prospecting system

Acceleration sensor

RENESAS TECH CORP

Polishing method, metallization fabrication method, method for manufacturing semiconductor device and semiconductor device

Methods of polishing, interconnect-fabrication, and producing semiconductor devices

Polishing apparatus

Polishing apparatus

Process and apparatus for manufacturing a semiconductor device

Polishing method, metallization fabrication method, method for manufacturing semiconductor device and semiconductor device

Apparatus and method for producing substrate with electrical wire thereon

Polishing method

SAKUMA NORIYUKI

Thermal type flow sensor having a humidity detection portion and an air flow detecting portion

Thermal fluid flow sensor having stacked insulating films above and below heater and temperature-measuring resistive elements

Thermal fluid flow sensor and method of manufacturing the same

Flow sensor using a heat element and a resistance temperature detector formed of a metal film

HITACHI AUTOMOTIVE SYSTEMS LTD

Physical quantity sensor

Thermal air flow sensor

Method of manufacturing the thermal fluid flow sensor

HITACHI HIGH TECH CORP

Fuel cell

Fuel battery cell, fuel battery system, leak detection method

YOKOGAWA ELECTRIC CORP

Data collection apparatus

Multi-interval data acquisition apparatus

ELPIDA MEMORY INC

Wafer polishing method and wafer polishing apparatus in semiconductor fabrication equipment