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Inventor
KOEK YUECEL
NL
2 patents
⚠️ This page may combine multiple inventors who share the name “KOEK YUECEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
1 patent
US7751027B2
Jul 6, 2010
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV
18 citations
82
JANSSEN FRANCISCUS JOHANNES JOSEPH
1 patent
US8451423B2
May 28, 2013
Lithographic apparatus and method
JANSSEN FRANCISCUS JOHANNES JOSEPH
7 citations
79