Inventor

MU HUIHUI

CN2 patents

Patents

2 patents

US9719723B2Aug 1, 2017

Substrate support structure, vacuum drying apparatus and method for vacuum drying a substrate

BOE TECHNOLOGY GROUP CO LTD0 citations40

US10407768B2Sep 10, 2019

Clamp and carrier used in a coating apparatus

BOE TECHNOLOGY GROUP CO LTD0 citations24