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Inventor
DE BHOLA N
US
2 patents
Patents
2 patents
US5408322A
Apr 18, 1995
Self aligning in-situ ellipsometer and method of using for process monitoring
MATERIALS RESEARCH CORP
99 citations
93
US5474667A
Dec 12, 1995
Reduced stress sputtering target and method of manufacturing therefor
MATERIALS RESEARCH CORP
16 citations
71