Inventor
MORIMOTO TAKAFUMI
JP15 patents
⚠️ This page may combine multiple inventors who share the name “MORIMOTO TAKAFUMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI CONSTRUCTION MACHINERY
5 patentsUS6229607B1May 8, 2001
Fine movement mechanism unit and scanning probe microscope
HITACHI CONSTRUCTION MACHINERY87 citations97
US6881954B1Apr 19, 2005
Scanning probe microscope and method of measurement
HITACHI CONSTRUCTION MACHINERY36 citations92
US5965881AOct 12, 1999
Scanning probe microscope and processing apparatus
HITACHI CONSTRUCTION MACHINERY32 citations92
US6278113B1Aug 21, 2001
Scanning probe microscope
HITACHI CONSTRUCTION MACHINERY27 citations90
US6184533B1Feb 6, 2001
Scanning probe microscope with the stage unit
HITACHI CONSTRUCTION MACHINERY5 citations62
HITACHI LTD
4 patentsHITACHI KENKI FINE TECH CO LTD
3 patentsUS7243441B2Jul 17, 2007
Method and apparatus for measuring depth of holes formed on a specimen
HITACHI KENKI FINE TECH CO LTD8 citations72
US7350404B2Apr 1, 2008
Scanning type probe microscope and probe moving control method therefor
HITACHI KENKI FINE TECH CO LTD3 citations59
US7388199B2Jun 17, 2008
Probe manufacturing method, probe, and scanning probe microscope
HITACHI KENKI FINE TECH CO LTD5 citations58