Inventor

SHIM JANG WOO

KR3 patents

⚠️ This page may combine multiple inventors who share the name “SHIM JANG WOO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

AP SYSTEMS INC

2 patents

US9318359B2Apr 19, 2016

Apparatus for substrate treatment and heating apparatus

AP SYSTEMS INC5 citations65

US9117858B2Aug 25, 2015

Heater block and heat treatment apparatus having the same

AP SYSTEMS INC0 citations44

ASIA PACIFIC SYSTEMS INC

1 patent

US8346068B2Jan 1, 2013

Substrate rotating and oscillating apparatus for rapid thermal process

ASIA PACIFIC SYSTEMS INC1 citations39