Inventor
SHU JIEHUI
US83 patents
⚠️ This page may combine multiple inventors who share the name “SHU JIEHUI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
GLOBALFOUNDRIES INC
32 patentsUS10217846B1Feb 26, 2019
Vertical field effect transistor formation with critical dimension control
GLOBALFOUNDRIES INC21 citations94
US10236213B1Mar 19, 2019
Gate cut structure with liner spacer and related method
GLOBALFOUNDRIES INC25 citations93
US10192780B1Jan 29, 2019
Self-aligned multiple patterning processes using bi-layer mandrels and cuts formed with block masks
GLOBALFOUNDRIES INC15 citations85
US10475791B1Nov 12, 2019
Transistor fins with different thickness gate dielectric
GLOBALFOUNDRIES INC12 citations84
US9865681B1Jan 9, 2018
Nanowire transistors having multiple threshold voltages
GLOBALFOUNDRIES INC12 citations84
US10002793B1Jun 19, 2018
Sub-fin doping method
GLOBALFOUNDRIES INC8 citations83
US9761452B1Sep 12, 2017
Devices and methods of forming SADP on SRAM and SAQP on logic
GLOBALFOUNDRIES INC7 citations83
US9984933B1May 29, 2018
Silicon liner for STI CMP stop in FinFET
GLOBALFOUNDRIES INC7 citations82
US9711447B1Jul 18, 2017
Self-aligned lithographic patterning with variable spacings
GLOBALFOUNDRIES INC15 citations82
US10249496B2Apr 2, 2019
Narrowed feature formation during a double patterning process
GLOBALFOUNDRIES INC7 citations80
US10797046B1Oct 6, 2020
Resistor structure for integrated circuit, and related methods
GLOBALFOUNDRIES INC3 citations73
US10777637B2Sep 15, 2020
Integrated circuit product with a multi-layer single diffusion break and methods of making such products
GLOBALFOUNDRIES INC2 citations73
US10699957B2Jun 30, 2020
Late gate cut using selective dielectric deposition
GLOBALFOUNDRIES INC4 citations73
US10692812B2Jun 23, 2020
Interconnects with variable space mandrel cuts formed by block patterning
GLOBALFOUNDRIES INC4 citations73
US10685840B2Jun 16, 2020
Gate structures
GLOBALFOUNDRIES INC3 citations73
US10586860B2Mar 10, 2020
Method of manufacturing finfet devices using narrow and wide gate cut openings in conjunction with a replacement metal gate process
GLOBALFOUNDRIES INC6 citations73
US10573753B1Feb 25, 2020
Oxide spacer in a contact over active gate finFET and method of production thereof
GLOBALFOUNDRIES INC6 citations73
US10566202B1Feb 18, 2020
Gate structures of FinFET semiconductor devices
GLOBALFOUNDRIES INC2 citations73
US10475693B1Nov 12, 2019
Method for forming single diffusion breaks between finFET devices and the resulting devices
GLOBALFOUNDRIES INC3 citations73
US10446395B1Oct 15, 2019
Self-aligned multiple patterning processes with layered mandrels
GLOBALFOUNDRIES INC2 citations73
US10418272B1Sep 17, 2019
Methods, apparatus, and system for a semiconductor device comprising gates with short heights
GLOBALFOUNDRIES INC4 citations73
US10403742B2Sep 3, 2019
Field-effect transistors with fins formed by a damascene-like process
GLOBALFOUNDRIES INC2 citations73
US10347541B1Jul 9, 2019
Active gate contacts and method of fabrication thereof
GLOBALFOUNDRIES INC6 citations73
US10431500B1Oct 1, 2019
Multi-step insulator formation in trenches to avoid seams in insulators
GLOBALFOUNDRIES INC2 citations72
US10340183B1Jul 2, 2019
Cobalt plated via integration scheme
GLOBALFOUNDRIES INC4 citations72
US10340142B1Jul 2, 2019
Methods, apparatus and system for self-aligned metal hard masks
GLOBALFOUNDRIES INC3 citations72
US10811411B1Oct 20, 2020
Fin-type field effect transistor with reduced fin bulge and method
GLOBALFOUNDRIES INC4 citations71
US10453936B2Oct 22, 2019
Methods of forming replacement gate structures on transistor devices
GLOBALFOUNDRIES INC2 citations71
US9275898B1Mar 1, 2016
Method to improve selectivity cobalt cap process
GLOBALFOUNDRIES INC3 citations68
US9704746B1Jul 11, 2017
Advanced self-aligned patterning process with sit spacer as a final dielectric etch hardmask
GLOBALFOUNDRIES INC3 citations67
US10840245B1Nov 17, 2020
Semiconductor device with reduced parasitic capacitance
GLOBALFOUNDRIES INC1 citations63
US10629707B2Apr 21, 2020
FinFET structure with bulbous upper insulative cap portion to protect gate height, and related method
GLOBALFOUNDRIES INC1 citations63
GLOBALFOUNDRIES US INC
18 patentsUS11482456B2Oct 25, 2022
Forming two portion spacer after metal gate and contact formation, and related IC structure
GLOBALFOUNDRIES US INC4 citations73
US10971583B2Apr 6, 2021
Gate cut isolation including air gap, integrated circuit including same and related method
GLOBALFOUNDRIES US INC2 citations73
US11522068B2Dec 6, 2022
IC product comprising an insulating gate separation structure positioned between end surfaces of adjacent gate structures
GLOBALFOUNDRIES US INC2 citations71
US11610965B2Mar 21, 2023
Gate cut isolation including air gap, integrated circuit including same and related method
GLOBALFOUNDRIES US INC0 citations63
US11349028B2May 31, 2022
Semiconductor device with gate cut structure
GLOBALFOUNDRIES US INC0 citations63
US11121023B2Sep 14, 2021
FinFET device comprising a single diffusion break with an upper surface that is substantially coplanar with an upper surface of a fin
GLOBALFOUNDRIES US INC0 citations63
US11908917B2Feb 20, 2024
Gate structures
GLOBALFOUNDRIES US INC0 citations62
US11721728B2Aug 8, 2023
Self-aligned contact
GLOBALFOUNDRIES US INC0 citations62
US11563085B2Jan 24, 2023
Transistors with separately-formed source and drain
GLOBALFOUNDRIES US INC0 citations62
US11362178B2Jun 14, 2022
Asymmetric source drain structures
GLOBALFOUNDRIES US INC0 citations62
US11348870B2May 31, 2022
Electrical fuse formation during a multiple patterning process
GLOBALFOUNDRIES US INC0 citations62
US11171237B2Nov 9, 2021
Middle of line gate structures
GLOBALFOUNDRIES US INC1 citations62
US11145716B1Oct 12, 2021
Semiconductor devices with low resistance gate structures
GLOBALFOUNDRIES US INC0 citations62
US11114466B2Sep 7, 2021
IC products formed on a substrate having localized regions of high resistivity and methods of making such IC products
GLOBALFOUNDRIES US INC0 citations62
US11075298B2Jul 27, 2021
LDMOS integrated circuit product
GLOBALFOUNDRIES US INC0 citations62
US11075268B2Jul 27, 2021
Transistors with separately-formed source and drain
GLOBALFOUNDRIES US INC0 citations62
US11043566B2Jun 22, 2021
Semiconductor structures in a wide gate pitch region of semiconductor devices
GLOBALFOUNDRIES US INC0 citations62
US11004953B2May 11, 2021
Mask-free methods of forming structures in a semiconductor device
GLOBALFOUNDRIES US INC0 citations62
Showing the top 50 of 83 patents by PatentIndex Score.