Inventor
HUANG HAIGOU
US65 patents
⚠️ This page may combine multiple inventors who share the name “HUANG HAIGOU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
GLOBALFOUNDRIES INC
46 patentsUS10103238B1Oct 16, 2018
Nanosheet field-effect transistor with full dielectric isolation
GLOBALFOUNDRIES INC57 citations98
US9911736B1Mar 6, 2018
Method of forming field effect transistors with replacement metal gates and contacts and resulting structure
GLOBALFOUNDRIES INC86 citations97
US10217846B1Feb 26, 2019
Vertical field effect transistor formation with critical dimension control
GLOBALFOUNDRIES INC21 citations94
US10176995B1Jan 8, 2019
Methods, apparatus and system for gate cut process using a stress material in a finFET device
GLOBALFOUNDRIES INC29 citations94
US9812365B1Nov 7, 2017
Methods of cutting gate structures on transistor devices
GLOBALFOUNDRIES INC26 citations94
US9679985B1Jun 13, 2017
Devices and methods of improving device performance through gate cut last process
GLOBALFOUNDRIES INC30 citations94
US9466723B1Oct 11, 2016
Liner and cap layer for placeholder source/drain contact structure planarization and replacement
GLOBALFOUNDRIES INC31 citations94
US9123773B1Sep 1, 2015
T-shaped single diffusion barrier with single mask approach process flow
GLOBALFOUNDRIES INC34 citations91
US10090169B1Oct 2, 2018
Methods of forming integrated circuit structures including opening filled with insulator in metal gate
GLOBALFOUNDRIES INC18 citations86
US10483369B2Nov 19, 2019
Methods of forming replacement gate structures on transistor devices
GLOBALFOUNDRIES INC7 citations84
US10325819B1Jun 18, 2019
Methods, apparatus and system for providing a pre-RMG replacement metal contact for a finFET device
GLOBALFOUNDRIES INC15 citations84
US10211315B2Feb 19, 2019
Vertical field-effect transistor having a dielectric spacer between a gate electrode edge and a self-aligned source/drain contact
GLOBALFOUNDRIES INC11 citations84
US9991361B2Jun 5, 2018
Methods for performing a gate cut last scheme for FinFET semiconductor devices
GLOBALFOUNDRIES INC9 citations84
US9916982B1Mar 13, 2018
Dielectric preservation in a replacement gate process
GLOBALFOUNDRIES INC10 citations84
US9837553B1Dec 5, 2017
Vertical field effect transistor
GLOBALFOUNDRIES INC8 citations84
US9761491B1Sep 12, 2017
Self-aligned deep contact for vertical FET
GLOBALFOUNDRIES INC16 citations84
US10014298B1Jul 3, 2018
Method of forming field effect transistors with replacement metal gates and contacts and resulting structure
GLOBALFOUNDRIES INC7 citations83
US10269654B1Apr 23, 2019
Methods, apparatus and system for replacement contact for a finFET device
GLOBALFOUNDRIES INC12 citations82
US10211103B1Feb 19, 2019
Advanced structure for self-aligned contact and method for producing the same
GLOBALFOUNDRIES INC18 citations82
US9711447B1Jul 18, 2017
Self-aligned lithographic patterning with variable spacings
GLOBALFOUNDRIES INC15 citations82
US9123771B2Sep 1, 2015
Shallow trench isolation integration methods and devices formed thereby
GLOBALFOUNDRIES INC13 citations82
US9589807B1Mar 7, 2017
Method for eliminating interlayer dielectric dishing and controlling gate height uniformity
GLOBALFOUNDRIES INC11 citations81
US10586860B2Mar 10, 2020
Method of manufacturing finfet devices using narrow and wide gate cut openings in conjunction with a replacement metal gate process
GLOBALFOUNDRIES INC6 citations73
US10418272B1Sep 17, 2019
Methods, apparatus, and system for a semiconductor device comprising gates with short heights
GLOBALFOUNDRIES INC4 citations73
US10204784B1Feb 12, 2019
Methods of forming features on integrated circuit products
GLOBALFOUNDRIES INC2 citations73
US10062772B2Aug 28, 2018
Preventing bridge formation between replacement gate and source/drain region through STI structure
GLOBALFOUNDRIES INC5 citations73
US9991363B1Jun 5, 2018
Contact etch stop layer with sacrificial polysilicon layer
GLOBALFOUNDRIES INC2 citations73
US9401416B2Jul 26, 2016
Method for reducing gate height variation due to overlapping masks
GLOBALFOUNDRIES INC4 citations73
US10644156B2May 5, 2020
Methods, apparatus, and system for reducing gate cut gouging and/or gate height loss in semiconductor devices
GLOBALFOUNDRIES INC5 citations72
US10431500B1Oct 1, 2019
Multi-step insulator formation in trenches to avoid seams in insulators
GLOBALFOUNDRIES INC2 citations72
US10418455B2Sep 17, 2019
Methods, apparatus and system for stringer defect reduction in a trench cut region of a finFET device
GLOBALFOUNDRIES INC2 citations72
US9935012B1Apr 3, 2018
Methods for forming different shapes in different regions of the same layer
GLOBALFOUNDRIES INC4 citations72
US10204797B1Feb 12, 2019
Methods, apparatus, and system for reducing step height difference in semiconductor devices
GLOBALFOUNDRIES INC2 citations71
US9922972B1Mar 20, 2018
Embedded silicon carbide block patterning
GLOBALFOUNDRIES INC6 citations71
US9865543B1Jan 9, 2018
Structure and method for inhibiting cobalt diffusion
GLOBALFOUNDRIES INC4 citations71
US9385192B2Jul 5, 2016
Shallow trench isolation integration methods and devices formed thereby
GLOBALFOUNDRIES INC3 citations71
US9230822B1Jan 5, 2016
Uniform gate height for mixed-type non-planar semiconductor devices
GLOBALFOUNDRIES INC2 citations63
US10923388B2Feb 16, 2021
Gap fill void and connection structures
GLOBALFOUNDRIES INC1 citations62
US10559470B2Feb 11, 2020
Capping structure
GLOBALFOUNDRIES INC1 citations62
US10930549B2Feb 23, 2021
Cap structure
GLOBALFOUNDRIES INC0 citations61
US10453754B1Oct 22, 2019
Diffused contact extension dopants in a transistor device
GLOBALFOUNDRIES INC0 citations52
US10403734B2Sep 3, 2019
Semiconductor device with reduced gate height budget
GLOBALFOUNDRIES INC0 citations52
US10347729B2Jul 9, 2019
Device for improving performance through gate cut last process
GLOBALFOUNDRIES INC0 citations52
US9698018B1Jul 4, 2017
Introducing self-aligned dopants in semiconductor fins
GLOBALFOUNDRIES INC1 citations52
US9368342B2Jun 14, 2016
Defect-free relaxed covering layer on semiconductor substrate with lattice mismatch
GLOBALFOUNDRIES INC0 citations52
US10777413B2Sep 15, 2020
Interconnects with non-mandrel cuts formed by early block patterning
GLOBALFOUNDRIES INC0 citations51
GLOBALFOUNDRIES US INC
4 patentsUS11114542B2Sep 7, 2021
Semiconductor device with reduced gate height budget
GLOBALFOUNDRIES US INC0 citations63
US11651992B2May 16, 2023
Gap fill void and connection structures
GLOBALFOUNDRIES US INC0 citations62
US11349013B2May 31, 2022
IC product comprising a novel insulating gate separation structure for transistor devices
GLOBALFOUNDRIES US INC0 citations62
US10964599B2Mar 30, 2021
Multi-step insulator formation in trenches to avoid seams in insulators
GLOBALFOUNDRIES US INC0 citations62
Showing the top 50 of 65 patents by PatentIndex Score.