P

Inventor

HUANG HAIGOU

US65 patents
⚠️ This page may combine multiple inventors who share the name “HUANG HAIGOU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

GLOBALFOUNDRIES INC

46 patents
US10103238B1Oct 16, 2018

Nanosheet field-effect transistor with full dielectric isolation

GLOBALFOUNDRIES INC57 citations98
US9911736B1Mar 6, 2018

Method of forming field effect transistors with replacement metal gates and contacts and resulting structure

GLOBALFOUNDRIES INC86 citations97
US10217846B1Feb 26, 2019

Vertical field effect transistor formation with critical dimension control

GLOBALFOUNDRIES INC21 citations94
US10176995B1Jan 8, 2019

Methods, apparatus and system for gate cut process using a stress material in a finFET device

GLOBALFOUNDRIES INC29 citations94
US9812365B1Nov 7, 2017

Methods of cutting gate structures on transistor devices

GLOBALFOUNDRIES INC26 citations94
US9679985B1Jun 13, 2017

Devices and methods of improving device performance through gate cut last process

GLOBALFOUNDRIES INC30 citations94
US9466723B1Oct 11, 2016

Liner and cap layer for placeholder source/drain contact structure planarization and replacement

GLOBALFOUNDRIES INC31 citations94
US9123773B1Sep 1, 2015

T-shaped single diffusion barrier with single mask approach process flow

GLOBALFOUNDRIES INC34 citations91
US10090169B1Oct 2, 2018

Methods of forming integrated circuit structures including opening filled with insulator in metal gate

GLOBALFOUNDRIES INC18 citations86
US10483369B2Nov 19, 2019

Methods of forming replacement gate structures on transistor devices

GLOBALFOUNDRIES INC7 citations84
US10325819B1Jun 18, 2019

Methods, apparatus and system for providing a pre-RMG replacement metal contact for a finFET device

GLOBALFOUNDRIES INC15 citations84
US10211315B2Feb 19, 2019

Vertical field-effect transistor having a dielectric spacer between a gate electrode edge and a self-aligned source/drain contact

GLOBALFOUNDRIES INC11 citations84
US9991361B2Jun 5, 2018

Methods for performing a gate cut last scheme for FinFET semiconductor devices

GLOBALFOUNDRIES INC9 citations84
US9916982B1Mar 13, 2018

Dielectric preservation in a replacement gate process

GLOBALFOUNDRIES INC10 citations84
US9837553B1Dec 5, 2017

Vertical field effect transistor

GLOBALFOUNDRIES INC8 citations84
US9761491B1Sep 12, 2017

Self-aligned deep contact for vertical FET

GLOBALFOUNDRIES INC16 citations84
US10014298B1Jul 3, 2018

Method of forming field effect transistors with replacement metal gates and contacts and resulting structure

GLOBALFOUNDRIES INC7 citations83
US10269654B1Apr 23, 2019

Methods, apparatus and system for replacement contact for a finFET device

GLOBALFOUNDRIES INC12 citations82
US10211103B1Feb 19, 2019

Advanced structure for self-aligned contact and method for producing the same

GLOBALFOUNDRIES INC18 citations82
US9711447B1Jul 18, 2017

Self-aligned lithographic patterning with variable spacings

GLOBALFOUNDRIES INC15 citations82
US9123771B2Sep 1, 2015

Shallow trench isolation integration methods and devices formed thereby

GLOBALFOUNDRIES INC13 citations82
US9589807B1Mar 7, 2017

Method for eliminating interlayer dielectric dishing and controlling gate height uniformity

GLOBALFOUNDRIES INC11 citations81
US10586860B2Mar 10, 2020

Method of manufacturing finfet devices using narrow and wide gate cut openings in conjunction with a replacement metal gate process

GLOBALFOUNDRIES INC6 citations73
US10418272B1Sep 17, 2019

Methods, apparatus, and system for a semiconductor device comprising gates with short heights

GLOBALFOUNDRIES INC4 citations73
US10204784B1Feb 12, 2019

Methods of forming features on integrated circuit products

GLOBALFOUNDRIES INC2 citations73
US10062772B2Aug 28, 2018

Preventing bridge formation between replacement gate and source/drain region through STI structure

GLOBALFOUNDRIES INC5 citations73
US9991363B1Jun 5, 2018

Contact etch stop layer with sacrificial polysilicon layer

GLOBALFOUNDRIES INC2 citations73
US9401416B2Jul 26, 2016

Method for reducing gate height variation due to overlapping masks

GLOBALFOUNDRIES INC4 citations73
US10644156B2May 5, 2020

Methods, apparatus, and system for reducing gate cut gouging and/or gate height loss in semiconductor devices

GLOBALFOUNDRIES INC5 citations72
US10431500B1Oct 1, 2019

Multi-step insulator formation in trenches to avoid seams in insulators

GLOBALFOUNDRIES INC2 citations72
US10418455B2Sep 17, 2019

Methods, apparatus and system for stringer defect reduction in a trench cut region of a finFET device

GLOBALFOUNDRIES INC2 citations72
US9935012B1Apr 3, 2018

Methods for forming different shapes in different regions of the same layer

GLOBALFOUNDRIES INC4 citations72
US10204797B1Feb 12, 2019

Methods, apparatus, and system for reducing step height difference in semiconductor devices

GLOBALFOUNDRIES INC2 citations71
US9922972B1Mar 20, 2018

Embedded silicon carbide block patterning

GLOBALFOUNDRIES INC6 citations71
US9865543B1Jan 9, 2018

Structure and method for inhibiting cobalt diffusion

GLOBALFOUNDRIES INC4 citations71
US9385192B2Jul 5, 2016

Shallow trench isolation integration methods and devices formed thereby

GLOBALFOUNDRIES INC3 citations71
US9230822B1Jan 5, 2016

Uniform gate height for mixed-type non-planar semiconductor devices

GLOBALFOUNDRIES INC2 citations63
US10923388B2Feb 16, 2021

Gap fill void and connection structures

GLOBALFOUNDRIES INC1 citations62
US10559470B2Feb 11, 2020

Capping structure

GLOBALFOUNDRIES INC1 citations62
US10930549B2Feb 23, 2021

Cap structure

GLOBALFOUNDRIES INC0 citations61
US10453754B1Oct 22, 2019

Diffused contact extension dopants in a transistor device

GLOBALFOUNDRIES INC0 citations52
US10403734B2Sep 3, 2019

Semiconductor device with reduced gate height budget

GLOBALFOUNDRIES INC0 citations52
US10347729B2Jul 9, 2019

Device for improving performance through gate cut last process

GLOBALFOUNDRIES INC0 citations52
US9698018B1Jul 4, 2017

Introducing self-aligned dopants in semiconductor fins

GLOBALFOUNDRIES INC1 citations52
US9368342B2Jun 14, 2016

Defect-free relaxed covering layer on semiconductor substrate with lattice mismatch

GLOBALFOUNDRIES INC0 citations52
US10777413B2Sep 15, 2020

Interconnects with non-mandrel cuts formed by early block patterning

GLOBALFOUNDRIES INC0 citations51

GLOBALFOUNDRIES US INC

4 patents

Showing the top 50 of 65 patents by PatentIndex Score.