Inventor
SHENG HAIFENG
US18 patents
⚠️ This page may combine multiple inventors who share the name “SHENG HAIFENG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
GLOBALFOUNDRIES INC
9 patentsUS9761452B1Sep 12, 2017
Devices and methods of forming SADP on SRAM and SAQP on logic
GLOBALFOUNDRIES INC7 citations83
US9711447B1Jul 18, 2017
Self-aligned lithographic patterning with variable spacings
GLOBALFOUNDRIES INC15 citations82
US9991363B1Jun 5, 2018
Contact etch stop layer with sacrificial polysilicon layer
GLOBALFOUNDRIES INC2 citations73
US9673301B1Jun 6, 2017
Methods of forming spacers on FinFET devices
GLOBALFOUNDRIES INC2 citations70
US9905472B1Feb 27, 2018
Silicon nitride CESL removal without gate cap height loss and resulting device
GLOBALFOUNDRIES INC0 citations52
US10714376B2Jul 14, 2020
Method of forming semiconductor material in trenches having different widths, and related structures
GLOBALFOUNDRIES INC0 citations41
US9627274B1Apr 18, 2017
Methods of forming self-aligned contacts on FinFET devices
GLOBALFOUNDRIES INC0 citations41
US10056458B2Aug 21, 2018
Siloxane and organic-based MOL contact patterning
GLOBALFOUNDRIES INC0 citations39
US9966272B1May 8, 2018
Methods for nitride planarization using dielectric
GLOBALFOUNDRIES INC0 citations39
GLOBALFOUNDRIES SG PTE LTD
3 patentsUS10062641B2Aug 28, 2018
Integrated circuits including a dummy metal feature and methods of forming the same
GLOBALFOUNDRIES SG PTE LTD3 citations73
US7993997B2Aug 9, 2011
Poly profile engineering to modulate spacer induced stress for device enhancement
GLOBALFOUNDRIES SG PTE LTD3 citations62
US9793208B2Oct 17, 2017
Plasma discharge path
GLOBALFOUNDRIES SG PTE LTD0 citations41