P

Inventor

SUN ZHIGUO

US32 patents
⚠️ This page may combine multiple inventors who share the name “SUN ZHIGUO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

GLOBALFOUNDRIES INC

21 patents
US9711447B1Jul 18, 2017

Self-aligned lithographic patterning with variable spacings

GLOBALFOUNDRIES INC15 citations82
US9613855B1Apr 4, 2017

Methods of forming MIS contact structures on transistor devices in CMOS applications

GLOBALFOUNDRIES INC7 citations82
US10446395B1Oct 15, 2019

Self-aligned multiple patterning processes with layered mandrels

GLOBALFOUNDRIES INC2 citations73
US10340183B1Jul 2, 2019

Cobalt plated via integration scheme

GLOBALFOUNDRIES INC4 citations72
US9275898B1Mar 1, 2016

Method to improve selectivity cobalt cap process

GLOBALFOUNDRIES INC3 citations68
US8993446B2Mar 31, 2015

Method of forming a dielectric film

GLOBALFOUNDRIES INC2 citations62
US8716150B1May 6, 2014

Method of forming a low-K dielectric film

GLOBALFOUNDRIES INC3 citations62
US9076645B1Jul 7, 2015

Method of fabricating an interlayer structure of increased elasticity modulus

GLOBALFOUNDRIES INC2 citations61
US9349608B2May 24, 2016

Methods of protecting a dielectric mask layer and related semiconductor devices

GLOBALFOUNDRIES INC2 citations58
US9418832B2Aug 16, 2016

Method of forming a dielectric film

GLOBALFOUNDRIES INC0 citations52
US9142422B2Sep 22, 2015

Methods of fabricating defect-free semiconductor structures

GLOBALFOUNDRIES INC0 citations52
US10770344B2Sep 8, 2020

Chamferless interconnect vias of semiconductor devices

GLOBALFOUNDRIES INC0 citations51
US10714380B2Jul 14, 2020

Method of forming smooth sidewall structures using spacer materials

GLOBALFOUNDRIES INC0 citations51
US10043753B2Aug 7, 2018

Airgaps to isolate metallization features

GLOBALFOUNDRIES INC0 citations51
US9768058B2Sep 19, 2017

Methods of forming air gaps in metallization layers on integrated circuit products

GLOBALFOUNDRIES INC1 citations51
US9502232B2Nov 22, 2016

Inhibiting diffusion of elements between material layers of a layered circuit structure

GLOBALFOUNDRIES INC0 citations51
US10109521B1Oct 23, 2018

Method to prevent cobalt recess

GLOBALFOUNDRIES INC0 citations50
US9184288B2Nov 10, 2015

Semiconductor structures with bridging films and methods of fabrication

GLOBALFOUNDRIES INC0 citations50
US9595493B2Mar 14, 2017

Reducing liner corrosion during metallization of semiconductor devices

GLOBALFOUNDRIES INC0 citations42
US9741610B2Aug 22, 2017

Sacrificial amorphous silicon hard mask for BEOL

GLOBALFOUNDRIES INC0 citations41
US9831123B2Nov 28, 2017

Methods of forming MIS contact structures on transistor devices

GLOBALFOUNDRIES INC0 citations40

UNIV YANSHAN

8 patents

GLOBALFOUNDRIES US INC

1 patent

IBM

1 patent

UNIV ZHEJIANG OCEAN

1 patent