Inventor
SUN ZHIGUO
US32 patents
⚠️ This page may combine multiple inventors who share the name “SUN ZHIGUO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
GLOBALFOUNDRIES INC
21 patentsUS9711447B1Jul 18, 2017
Self-aligned lithographic patterning with variable spacings
GLOBALFOUNDRIES INC15 citations82
US9613855B1Apr 4, 2017
Methods of forming MIS contact structures on transistor devices in CMOS applications
GLOBALFOUNDRIES INC7 citations82
US10446395B1Oct 15, 2019
Self-aligned multiple patterning processes with layered mandrels
GLOBALFOUNDRIES INC2 citations73
US10340183B1Jul 2, 2019
Cobalt plated via integration scheme
GLOBALFOUNDRIES INC4 citations72
US9275898B1Mar 1, 2016
Method to improve selectivity cobalt cap process
GLOBALFOUNDRIES INC3 citations68
US8993446B2Mar 31, 2015
Method of forming a dielectric film
GLOBALFOUNDRIES INC2 citations62
US8716150B1May 6, 2014
Method of forming a low-K dielectric film
GLOBALFOUNDRIES INC3 citations62
US9076645B1Jul 7, 2015
Method of fabricating an interlayer structure of increased elasticity modulus
GLOBALFOUNDRIES INC2 citations61
US9349608B2May 24, 2016
Methods of protecting a dielectric mask layer and related semiconductor devices
GLOBALFOUNDRIES INC2 citations58
US9418832B2Aug 16, 2016
Method of forming a dielectric film
GLOBALFOUNDRIES INC0 citations52
US9142422B2Sep 22, 2015
Methods of fabricating defect-free semiconductor structures
GLOBALFOUNDRIES INC0 citations52
US10770344B2Sep 8, 2020
Chamferless interconnect vias of semiconductor devices
GLOBALFOUNDRIES INC0 citations51
US10714380B2Jul 14, 2020
Method of forming smooth sidewall structures using spacer materials
GLOBALFOUNDRIES INC0 citations51
US10043753B2Aug 7, 2018
Airgaps to isolate metallization features
GLOBALFOUNDRIES INC0 citations51
US9768058B2Sep 19, 2017
Methods of forming air gaps in metallization layers on integrated circuit products
GLOBALFOUNDRIES INC1 citations51
US9502232B2Nov 22, 2016
Inhibiting diffusion of elements between material layers of a layered circuit structure
GLOBALFOUNDRIES INC0 citations51
US10109521B1Oct 23, 2018
Method to prevent cobalt recess
GLOBALFOUNDRIES INC0 citations50
US9184288B2Nov 10, 2015
Semiconductor structures with bridging films and methods of fabrication
GLOBALFOUNDRIES INC0 citations50
US9595493B2Mar 14, 2017
Reducing liner corrosion during metallization of semiconductor devices
GLOBALFOUNDRIES INC0 citations42
US9741610B2Aug 22, 2017
Sacrificial amorphous silicon hard mask for BEOL
GLOBALFOUNDRIES INC0 citations41
US9831123B2Nov 28, 2017
Methods of forming MIS contact structures on transistor devices
GLOBALFOUNDRIES INC0 citations40
UNIV YANSHAN
8 patentsUS11618294B2Apr 4, 2023
Active-passive dual mode switchable vehicle suspension system and switching method therefor
UNIV YANSHAN9 citations82
US11326985B2May 10, 2022
Inertial regulation active suspension system based on vehicle posture deviation, and control method thereof
UNIV YANSHAN4 citations70
US11813915B2Nov 14, 2023
Active suspension inertia regulation method based on vehicle-front terrain, and control system
UNIV YANSHAN1 citations60
US11906392B2Feb 20, 2024
In-vehicle stable platform system employing active suspension and control method thereof
UNIV YANSHAN0 citations59
US11280703B2Mar 22, 2022
Vehicle-mounted motion simulation platform based on active suspension, and control method thereof
UNIV YANSHAN0 citations59
US11999211B2Jun 4, 2024
Vehicle active suspension inertia regulation method based on wheel supporting force, and control system
UNIV YANSHAN0 citations50
US11813914B2Nov 14, 2023
Hydraulic active suspension flow control system
UNIV YANSHAN0 citations46
US12179937B1Dec 31, 2024
Hydraulic system for rapid mooring device of offshore operation helicopter and control method
UNIV YANSHAN0 citations44