Inventor
SHIODE YOSHIHIRO
JP25 patents
⚠️ This page may combine multiple inventors who share the name “SHIODE YOSHIHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON KK
21 patentsUS9283720B2Mar 15, 2016
Position detection apparatus, imprint apparatus, and position detection method
CANON KK19 citations92
US7190443B2Mar 13, 2007
Reticle and optical characteristic measuring method
CANON KK17 citations92
US6982786B2Jan 3, 2006
Reticle and optical characteristic measuring method
CANON KK24 citations92
US6633390B2Oct 14, 2003
Focus measurement in projection exposure apparatus
CANON KK31 citations89
US6960415B2Nov 1, 2005
Aberration measuring method and projection exposure apparatus
CANON KK12 citations84
US9798231B2Oct 24, 2017
Imprint apparatus and method of manufacturing article
CANON KK4 citations73
US7221434B2May 22, 2007
Exposure method and apparatus
CANON KK9 citations73
US7193713B2Mar 20, 2007
Method and apparatus for measuring optical characteristic, and projection exposure apparatus using the same
CANON KK9 citations73
US10095117B2Oct 9, 2018
Imprint apparatus
CANON KK4 citations72
US11400619B2Aug 2, 2022
Imprint method and article manufacturing method
CANON KK1 citations62
US10828808B2Nov 10, 2020
Imprint apparatus, imprint method, and method of manufacturing article
CANON KK1 citations62
US7826044B2Nov 2, 2010
Measurement method and apparatus, and exposure apparatus
CANON KK3 citations62
US7499179B2Mar 3, 2009
Measurement method and apparatus, exposure apparatus, exposure method, and adjusting method
CANON KK3 citations62
US7468798B2Dec 23, 2008
System and method for polarization characteristic measurement of optical systems via centroid analysis
CANON KK2 citations62
US7423740B2Sep 9, 2008
Reticle and optical characteristic measuring method
CANON KK3 citations62
US7375805B2May 20, 2008
Reticle and optical characteristic measuring method
CANON KK2 citations62
US12399425B2Aug 26, 2025
Molding apparatus and article manufacturing method
CANON KK0 citations52
US11759994B2Sep 19, 2023
Imprint apparatus, imprint method, and article manufacturing method
CANON KK0 citations52
US11413651B2Aug 16, 2022
Imprint apparatus, operation method of imprint apparatus, and article manufacturing method
CANON KK0 citations52
US10705422B2Jul 7, 2020
Imprint method
CANON KK0 citations52
US9921470B2Mar 20, 2018
Imprint method for an imprint apparatus which transfers a pattern onto a substrate by using a mold
CANON KK0 citations41