Inventor

YEH LEE-CHIH

TW3 patents

⚠️ This page may combine multiple inventors who share the name “YEH LEE-CHIH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TAIWAN SEMICONDUCTOR MFG

2 patents

US7906252B2Mar 15, 2011

Multiple resist layer phase shift mask (PSM) blank and PSM formation method

TAIWAN SEMICONDUCTOR MFG9 citations81

US7924405B2Apr 12, 2011

Compensation of reticle flatness on focus deviation in optical lithography

TAIWAN SEMICONDUCTOR MFG2 citations61

LEE HSIN-CHANG

1 patent

US8589828B2Nov 19, 2013

Reduce mask overlay error by removing film deposited on blank of mask

LEE HSIN-CHANG29 citations90