Inventor
TANTIWONG KYLE R
US4 patents
Patents
4 patentsUS10271416B2Apr 23, 2019
High efficiency triple-coil inductively coupled plasma source with phase control
APPLIED MATERIALS INC2 citations68
US9472378B2Oct 18, 2016
Multiple zone coil antenna with plural radial lobes
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US11908716B2Feb 20, 2024
Image-based in-situ process monitoring
APPLIED MATERIALS INC0 citations49
US9312104B2Apr 12, 2016
Coil antenna with plural radial lobes
APPLIED MATERIALS INC0 citations49