Inventor

KIM CHEE-WAN

KR2 patents

Patents

2 patents

US7972874B2Jul 5, 2011

Semiconductor process evaluation methods including variable ion implanting conditions

SAMSUNG ELECTRONICS CO LTD0 citations46

US7781234B2Aug 24, 2010

Semiconductor process evaluation methods including variable ion implanting conditions

SAMSUNG ELECTRONICS CO LTD1 citations46