Inventor
HEIDENREICH III JOHN EDWARD
US3 patents
Patents
3 patentsUS6187680B1Feb 13, 2001
Method/structure for creating aluminum wirebound pad on copper BEOL
IBM353 citations96
US5650032AJul 22, 1997
Apparatus for producing an inductive plasma for plasma processes
IBM92 citations93
US6333559B1Dec 25, 2001
Method/structure for creating aluminum wirebound pad on copper BEOL
IBM41 citations90