Inventor
NAKASHIMA NORMAN
US10 patents
⚠️ This page may combine multiple inventors who share the name “NAKASHIMA NORMAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
8 patentsUS6916398B2Jul 12, 2005
Gas delivery apparatus and method for atomic layer deposition
APPLIED MATERIALS INC646 citations99
US7780785B2Aug 24, 2010
Gas delivery apparatus for atomic layer deposition
APPLIED MATERIALS INC61 citations98
US7780788B2Aug 24, 2010
Gas delivery apparatus for atomic layer deposition
APPLIED MATERIALS INC17 citations92
US7699023B2Apr 20, 2010
Gas delivery apparatus for atomic layer deposition
APPLIED MATERIALS INC34 citations92
US7562672B2Jul 21, 2009
Chemical delivery apparatus for CVD or ALD
APPLIED MATERIALS INC15 citations92
US7748400B2Jul 6, 2010
Chemical delivery apparatus for CVD or ALD
APPLIED MATERIALS INC8 citations84
US7568495B2Aug 4, 2009
Chemical delivery apparatus for CVD or ALD
APPLIED MATERIALS INC9 citations84
US7832432B2Nov 16, 2010
Chemical delivery apparatus for CVD or ALD
APPLIED MATERIALS INC3 citations63