Inventor
HSIA CHEN-YUAN
TW3 patents
Patents
3 patentsUS7819980B2Oct 26, 2010
System and method for removing particles in semiconductor manufacturing
TAIWAN SEMICONDUCTOR MFG4 citations61
US8046860B2Nov 1, 2011
System and method for removing particles in semiconductor manufacturing
TAIWAN SEMICONDUCTOR MFG0 citations50
US7460251B2Dec 2, 2008
Dimension monitoring method and system
TAIWAN SEMICONDUCTOR MFG0 citations48