Inventor
HUNG CHANG-CHENG
TW17 patents
⚠️ This page may combine multiple inventors who share the name “HUNG CHANG-CHENG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG
12 patentsUS7162071B2Jan 9, 2007
Progressive self-learning defect review and classification method
TAIWAN SEMICONDUCTOR MFG39 citations89
US8038897B2Oct 18, 2011
Method and system for wafer inspection
TAIWAN SEMICONDUCTOR MFG8 citations83
US6365303B1Apr 2, 2002
Electrostatic discharge damage prevention method on masks
TAIWAN SEMICONDUCTOR MFG15 citations80
US7035449B2Apr 25, 2006
Method for applying a defect finder mark to a backend photomask making process
TAIWAN SEMICONDUCTOR MFG7 citations70
US7819980B2Oct 26, 2010
System and method for removing particles in semiconductor manufacturing
TAIWAN SEMICONDUCTOR MFG4 citations61
US6861179B1Mar 1, 2005
Charge effect and electrostatic damage prevention method on photo-mask
TAIWAN SEMICONDUCTOR MFG4 citations61
US7759136B2Jul 20, 2010
Critical dimension (CD) control by spectrum metrology
TAIWAN SEMICONDUCTOR MFG4 citations59
US6858353B2Feb 22, 2005
Increased-contrast film for high-transmittance attenuated phase-shaft masks
TAIWAN SEMICONDUCTOR MFG1 citations51
US6858354B1Feb 22, 2005
Method to prevent side lobe on seal ring
TAIWAN SEMICONDUCTOR MFG1 citations51
US8046860B2Nov 1, 2011
System and method for removing particles in semiconductor manufacturing
TAIWAN SEMICONDUCTOR MFG0 citations50
US6653029B2Nov 25, 2003
Dual-focused ion beams for semiconductor image scanning and mask repair
TAIWAN SEMICONDUCTOR MFG1 citations50
US7460251B2Dec 2, 2008
Dimension monitoring method and system
TAIWAN SEMICONDUCTOR MFG0 citations48